TiN THIN FILMS: DEFECT GENERATION, RESIDUAL STRESSES AND HARDNESS

TiN THIN FILMS: DEFECT GENERATION, RESIDUAL STRESSES AND HARDNESS

Bibliographic Details
Main Authors: Hultman, Lars, Sundgren, Jan-Eric
Format: Article
Language:English
Published: De Gruyter 2000-06-01
Series:Journal of the Mechanical Behavior of Materials
Online Access:https://doi.org/10.1515/JMBM.2000.11.1-3.59
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spelling doaj-beee382202ef460eaf304d805a77adf52021-10-02T19:24:54ZengDe GruyterJournal of the Mechanical Behavior of Materials0334-89382191-02432000-06-01111-3596210.1515/JMBM.2000.11.1-3.59TiN THIN FILMS: DEFECT GENERATION, RESIDUAL STRESSES AND HARDNESSHultman, LarsSundgren, Jan-Erichttps://doi.org/10.1515/JMBM.2000.11.1-3.59
collection DOAJ
language English
format Article
sources DOAJ
author Hultman, Lars
Sundgren, Jan-Eric
spellingShingle Hultman, Lars
Sundgren, Jan-Eric
TiN THIN FILMS: DEFECT GENERATION, RESIDUAL STRESSES AND HARDNESS
Journal of the Mechanical Behavior of Materials
author_facet Hultman, Lars
Sundgren, Jan-Eric
author_sort Hultman, Lars
title TiN THIN FILMS: DEFECT GENERATION, RESIDUAL STRESSES AND HARDNESS
title_short TiN THIN FILMS: DEFECT GENERATION, RESIDUAL STRESSES AND HARDNESS
title_full TiN THIN FILMS: DEFECT GENERATION, RESIDUAL STRESSES AND HARDNESS
title_fullStr TiN THIN FILMS: DEFECT GENERATION, RESIDUAL STRESSES AND HARDNESS
title_full_unstemmed TiN THIN FILMS: DEFECT GENERATION, RESIDUAL STRESSES AND HARDNESS
title_sort tin thin films: defect generation, residual stresses and hardness
publisher De Gruyter
series Journal of the Mechanical Behavior of Materials
issn 0334-8938
2191-0243
publishDate 2000-06-01
url https://doi.org/10.1515/JMBM.2000.11.1-3.59
work_keys_str_mv AT hultmanlars tinthinfilmsdefectgenerationresidualstressesandhardness
AT sundgrenjaneric tinthinfilmsdefectgenerationresidualstressesandhardness
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