TiN THIN FILMS: DEFECT GENERATION, RESIDUAL STRESSES AND HARDNESS
| Main Authors: | , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
De Gruyter
2000-06-01
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| Series: | Journal of the Mechanical Behavior of Materials |
| Online Access: | https://doi.org/10.1515/JMBM.2000.11.1-3.59 |