Trace Moisture Response Property of Thin Film Nano Porous g- Al2O3 for Industrial Application

• Main Authors: Debdulal Saha, Kamalendu Sengupta
• Format: Article
• Language: English
• Published: IFSA Publishing, S.L. 2007-11-01
• Series: Sensors & Transducers
• Subjects: Thin film; Nanopore; g-Al2O3; Coating thickness; Suitable for making device
• Online Access: http://www.sensorsportal.com/HTML/DIGEST/november_07/P_205.pdf

Nano porous thin film g-Al2O3 is prepared by sol-gel method by heat treating process at 5500C.The samples are made of various coating thickness and investigated as trace moisture sensor at room temperature within the range of –720C to –420C dew point (DP). It is found that at a particular coating thickness the sensitivity and response time are found to be suitable for commercial application. The capacitance change over the dew point (DP) range from –720C to –420C is found to be prominent for making a sensitive device.