Micromecanizado de materiales cerámicos mediante láser de femtosegundo
In this work, we present the application of ultrashort and intense laser pulses (110 fs @ 1 kHz; up to 1.1 mJ/pulse) to the micromachining of ceramics, specifically RubalitTM708S, a material based on alumina and widely used as a substrate in microelectronics. The mechanism for removing material is t...
| Main Authors: | , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2005-02-01
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| Series: | Boletín de la Sociedad Española de Cerámica y Vidrio |
| Subjects: | |
| Online Access: | http://ceramicayvidrio.revistas.csic.es/index.php/ceramicayvidrio/article/view/397/415 |