Optical coatings – precision engineering on non-flat surfaces
Manufacturing of optical coatings is about the precise deposition of material and its control on the nanometer scale. This has to be achieved for a stack of multiple layers with a total thickness that can reach several micrometer. In addition, this has to be maintained for the complete functional ar...
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2020-01-01
|
| Series: | EPJ Web of Conferences |
| Online Access: | https://www.epj-conferences.org/articles/epjconf/pdf/2020/14/epjconf_eosam2020_03013.pdf |