A combined Kirkpatrick-Baez mirror and multilayer lens for sub-10 nm x-ray focusing

We have used a combined optical system of a high gain elliptic Kirkpatrick-Baez mirror system (KB) and a multilayer Laue lens (MLL) positioned in the focal plane of the KB for hard x-rays nano-focusing. The two-step focusing scheme is based on a high acceptance and high gain elliptical mirror with m...

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Main Authors: A. Ruhlandt, T. Liese, V. Radisch, S. P. Krüger, M. Osterhoff, K. Giewekemeyer, H. U. Krebs, T. Salditt
Format: Article
Language:English
Published: AIP Publishing LLC 2012-03-01
Series:AIP Advances
Online Access:http://dx.doi.org/10.1063/1.3698119
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spelling doaj-ba53363a70d943519275503a849cb5c12020-11-24T22:04:15ZengAIP Publishing LLCAIP Advances2158-32262012-03-0121012175012175-710.1063/1.3698119084201ADVA combined Kirkpatrick-Baez mirror and multilayer lens for sub-10 nm x-ray focusingA. Ruhlandt0T. Liese1V. Radisch2S. P. Krüger3M. Osterhoff4K. Giewekemeyer5H. U. Krebs6T. Salditt7Institut für Röntgenphysik, Universität Göttingen, Friedrich-Hund-Platz 1, 37077 Göttingen, GermanyInstitut für Materialphysik, Universität Göttingen, Friedrich-Hund-Platz 1, 37077 Göttingen, GermanyInstitut für Materialphysik, Universität Göttingen, Friedrich-Hund-Platz 1, 37077 Göttingen, GermanyInstitut für Röntgenphysik, Universität Göttingen, Friedrich-Hund-Platz 1, 37077 Göttingen, GermanyInstitut für Röntgenphysik, Universität Göttingen, Friedrich-Hund-Platz 1, 37077 Göttingen, GermanyInstitut für Röntgenphysik, Universität Göttingen, Friedrich-Hund-Platz 1, 37077 Göttingen, GermanyInstitut für Materialphysik, Universität Göttingen, Friedrich-Hund-Platz 1, 37077 Göttingen, GermanyInstitut für Röntgenphysik, Universität Göttingen, Friedrich-Hund-Platz 1, 37077 Göttingen, GermanyWe have used a combined optical system of a high gain elliptic Kirkpatrick-Baez mirror system (KB) and a multilayer Laue lens (MLL) positioned in the focal plane of the KB for hard x-rays nano-focusing. The two-step focusing scheme is based on a high acceptance and high gain elliptical mirror with moderate focal length and a MLL with ultra-short focal length. Importantly, fabrication constraints, i.e. in mirror polishing and bending, as well as MLL deposition can be significantly relaxed, since (a) the mirror focus in the range of 200-500 nm is sufficient, and (b) the number of layers of the MLL can be correspondingly small. First demonstrations of this setup at the coherence beamline of the PETRA III storage ring yield a highly divergent far-field diffraction pattern, from which the autocorrelation function of the near-field intensity distribution was obtained. The results show that the approach is well suited to reach smallest spot sizes in the sub-10nm range at high flux.http://dx.doi.org/10.1063/1.3698119
collection DOAJ
language English
format Article
sources DOAJ
author A. Ruhlandt
T. Liese
V. Radisch
S. P. Krüger
M. Osterhoff
K. Giewekemeyer
H. U. Krebs
T. Salditt
spellingShingle A. Ruhlandt
T. Liese
V. Radisch
S. P. Krüger
M. Osterhoff
K. Giewekemeyer
H. U. Krebs
T. Salditt
A combined Kirkpatrick-Baez mirror and multilayer lens for sub-10 nm x-ray focusing
AIP Advances
author_facet A. Ruhlandt
T. Liese
V. Radisch
S. P. Krüger
M. Osterhoff
K. Giewekemeyer
H. U. Krebs
T. Salditt
author_sort A. Ruhlandt
title A combined Kirkpatrick-Baez mirror and multilayer lens for sub-10 nm x-ray focusing
title_short A combined Kirkpatrick-Baez mirror and multilayer lens for sub-10 nm x-ray focusing
title_full A combined Kirkpatrick-Baez mirror and multilayer lens for sub-10 nm x-ray focusing
title_fullStr A combined Kirkpatrick-Baez mirror and multilayer lens for sub-10 nm x-ray focusing
title_full_unstemmed A combined Kirkpatrick-Baez mirror and multilayer lens for sub-10 nm x-ray focusing
title_sort combined kirkpatrick-baez mirror and multilayer lens for sub-10 nm x-ray focusing
publisher AIP Publishing LLC
series AIP Advances
issn 2158-3226
publishDate 2012-03-01
description We have used a combined optical system of a high gain elliptic Kirkpatrick-Baez mirror system (KB) and a multilayer Laue lens (MLL) positioned in the focal plane of the KB for hard x-rays nano-focusing. The two-step focusing scheme is based on a high acceptance and high gain elliptical mirror with moderate focal length and a MLL with ultra-short focal length. Importantly, fabrication constraints, i.e. in mirror polishing and bending, as well as MLL deposition can be significantly relaxed, since (a) the mirror focus in the range of 200-500 nm is sufficient, and (b) the number of layers of the MLL can be correspondingly small. First demonstrations of this setup at the coherence beamline of the PETRA III storage ring yield a highly divergent far-field diffraction pattern, from which the autocorrelation function of the near-field intensity distribution was obtained. The results show that the approach is well suited to reach smallest spot sizes in the sub-10nm range at high flux.
url http://dx.doi.org/10.1063/1.3698119
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