A combined Kirkpatrick-Baez mirror and multilayer lens for sub-10 nm x-ray focusing
We have used a combined optical system of a high gain elliptic Kirkpatrick-Baez mirror system (KB) and a multilayer Laue lens (MLL) positioned in the focal plane of the KB for hard x-rays nano-focusing. The two-step focusing scheme is based on a high acceptance and high gain elliptical mirror with m...
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doaj-ba53363a70d943519275503a849cb5c12020-11-24T22:04:15ZengAIP Publishing LLCAIP Advances2158-32262012-03-0121012175012175-710.1063/1.3698119084201ADVA combined Kirkpatrick-Baez mirror and multilayer lens for sub-10 nm x-ray focusingA. Ruhlandt0T. Liese1V. Radisch2S. P. Krüger3M. Osterhoff4K. Giewekemeyer5H. U. Krebs6T. Salditt7Institut für Röntgenphysik, Universität Göttingen, Friedrich-Hund-Platz 1, 37077 Göttingen, GermanyInstitut für Materialphysik, Universität Göttingen, Friedrich-Hund-Platz 1, 37077 Göttingen, GermanyInstitut für Materialphysik, Universität Göttingen, Friedrich-Hund-Platz 1, 37077 Göttingen, GermanyInstitut für Röntgenphysik, Universität Göttingen, Friedrich-Hund-Platz 1, 37077 Göttingen, GermanyInstitut für Röntgenphysik, Universität Göttingen, Friedrich-Hund-Platz 1, 37077 Göttingen, GermanyInstitut für Röntgenphysik, Universität Göttingen, Friedrich-Hund-Platz 1, 37077 Göttingen, GermanyInstitut für Materialphysik, Universität Göttingen, Friedrich-Hund-Platz 1, 37077 Göttingen, GermanyInstitut für Röntgenphysik, Universität Göttingen, Friedrich-Hund-Platz 1, 37077 Göttingen, GermanyWe have used a combined optical system of a high gain elliptic Kirkpatrick-Baez mirror system (KB) and a multilayer Laue lens (MLL) positioned in the focal plane of the KB for hard x-rays nano-focusing. The two-step focusing scheme is based on a high acceptance and high gain elliptical mirror with moderate focal length and a MLL with ultra-short focal length. Importantly, fabrication constraints, i.e. in mirror polishing and bending, as well as MLL deposition can be significantly relaxed, since (a) the mirror focus in the range of 200-500 nm is sufficient, and (b) the number of layers of the MLL can be correspondingly small. First demonstrations of this setup at the coherence beamline of the PETRA III storage ring yield a highly divergent far-field diffraction pattern, from which the autocorrelation function of the near-field intensity distribution was obtained. The results show that the approach is well suited to reach smallest spot sizes in the sub-10nm range at high flux.http://dx.doi.org/10.1063/1.3698119 |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
A. Ruhlandt T. Liese V. Radisch S. P. Krüger M. Osterhoff K. Giewekemeyer H. U. Krebs T. Salditt |
spellingShingle |
A. Ruhlandt T. Liese V. Radisch S. P. Krüger M. Osterhoff K. Giewekemeyer H. U. Krebs T. Salditt A combined Kirkpatrick-Baez mirror and multilayer lens for sub-10 nm x-ray focusing AIP Advances |
author_facet |
A. Ruhlandt T. Liese V. Radisch S. P. Krüger M. Osterhoff K. Giewekemeyer H. U. Krebs T. Salditt |
author_sort |
A. Ruhlandt |
title |
A combined Kirkpatrick-Baez mirror and multilayer lens for sub-10 nm x-ray focusing |
title_short |
A combined Kirkpatrick-Baez mirror and multilayer lens for sub-10 nm x-ray focusing |
title_full |
A combined Kirkpatrick-Baez mirror and multilayer lens for sub-10 nm x-ray focusing |
title_fullStr |
A combined Kirkpatrick-Baez mirror and multilayer lens for sub-10 nm x-ray focusing |
title_full_unstemmed |
A combined Kirkpatrick-Baez mirror and multilayer lens for sub-10 nm x-ray focusing |
title_sort |
combined kirkpatrick-baez mirror and multilayer lens for sub-10 nm x-ray focusing |
publisher |
AIP Publishing LLC |
series |
AIP Advances |
issn |
2158-3226 |
publishDate |
2012-03-01 |
description |
We have used a combined optical system of a high gain elliptic Kirkpatrick-Baez mirror system (KB) and a multilayer Laue lens (MLL) positioned in the focal plane of the KB for hard x-rays nano-focusing. The two-step focusing scheme is based on a high acceptance and high gain elliptical mirror with moderate focal length and a MLL with ultra-short focal length. Importantly, fabrication constraints, i.e. in mirror polishing and bending, as well as MLL deposition can be significantly relaxed, since (a) the mirror focus in the range of 200-500 nm is sufficient, and (b) the number of layers of the MLL can be correspondingly small. First demonstrations of this setup at the coherence beamline of the PETRA III storage ring yield a highly divergent far-field diffraction pattern, from which the autocorrelation function of the near-field intensity distribution was obtained. The results show that the approach is well suited to reach smallest spot sizes in the sub-10nm range at high flux. |
url |
http://dx.doi.org/10.1063/1.3698119 |
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