Polycrystallization effects on the nanoscale electrical properties of high-k dielectrics

Polycrystallization effects on the nanoscale electrical properties of high-k dielectrics

<p>Abstract</p> <p>In this study, atomic force microscopy-related techniques have been used to investigate, at the nanoscale, how the polycrystallization of an Al<sub>2</sub>O<sub>3</sub>-based gate stack, after a thermal annealing process, affects the varia...

Full description

Bibliographic Details
Main Authors: Lanza Mario, Iglesias Vanessa, Porti Marc, Nafria Montse, Aymerich Xavier
Format: Article
Language:English
Published: SpringerOpen 2011-01-01
Series:Nanoscale Research Letters
Online Access:http://www.nanoscalereslett.com/content/6/1/108
id doaj-ba207330a3b442b5bfcef88904891bbf
record_format Article
spelling doaj-ba207330a3b442b5bfcef88904891bbf2020-11-24T21:08:16ZengSpringerOpenNanoscale Research Letters1931-75731556-276X2011-01-0161108Polycrystallization effects on the nanoscale electrical properties of high-k dielectricsLanza MarioIglesias VanessaPorti MarcNafria MontseAymerich Xavier<p>Abstract</p> <p>In this study, atomic force microscopy-related techniques have been used to investigate, at the nanoscale, how the polycrystallization of an Al<sub>2</sub>O<sub>3</sub>-based gate stack, after a thermal annealing process, affects the variability of its electrical properties. The impact of an electrical stress on the electrical conduction and the charge trapping of amorphous and polycrystalline Al<sub>2</sub>O<sub>3 </sub>layers have been also analyzed.</p> http://www.nanoscalereslett.com/content/6/1/108
collection DOAJ
language English
format Article
sources DOAJ
author Lanza Mario
Iglesias Vanessa
Porti Marc
Nafria Montse
Aymerich Xavier
spellingShingle Lanza Mario
Iglesias Vanessa
Porti Marc
Nafria Montse
Aymerich Xavier
Polycrystallization effects on the nanoscale electrical properties of high-k dielectrics
Nanoscale Research Letters
author_facet Lanza Mario
Iglesias Vanessa
Porti Marc
Nafria Montse
Aymerich Xavier
author_sort Lanza Mario
title Polycrystallization effects on the nanoscale electrical properties of high-k dielectrics
title_short Polycrystallization effects on the nanoscale electrical properties of high-k dielectrics
title_full Polycrystallization effects on the nanoscale electrical properties of high-k dielectrics
title_fullStr Polycrystallization effects on the nanoscale electrical properties of high-k dielectrics
title_full_unstemmed Polycrystallization effects on the nanoscale electrical properties of high-k dielectrics
title_sort polycrystallization effects on the nanoscale electrical properties of high-k dielectrics
publisher SpringerOpen
series Nanoscale Research Letters
issn 1931-7573
1556-276X
publishDate 2011-01-01
description <p>Abstract</p> <p>In this study, atomic force microscopy-related techniques have been used to investigate, at the nanoscale, how the polycrystallization of an Al<sub>2</sub>O<sub>3</sub>-based gate stack, after a thermal annealing process, affects the variability of its electrical properties. The impact of an electrical stress on the electrical conduction and the charge trapping of amorphous and polycrystalline Al<sub>2</sub>O<sub>3 </sub>layers have been also analyzed.</p>
url http://www.nanoscalereslett.com/content/6/1/108
work_keys_str_mv AT lanzamario polycrystallizationeffectsonthenanoscaleelectricalpropertiesofhighkdielectrics
AT iglesiasvanessa polycrystallizationeffectsonthenanoscaleelectricalpropertiesofhighkdielectrics
AT portimarc polycrystallizationeffectsonthenanoscaleelectricalpropertiesofhighkdielectrics
AT nafriamontse polycrystallizationeffectsonthenanoscaleelectricalpropertiesofhighkdielectrics
AT aymerichxavier polycrystallizationeffectsonthenanoscaleelectricalpropertiesofhighkdielectrics
_version_ 1716760184805654528

Similar Items