Characterization of Optical and Electrical Properties of Transparent Conductive Boron-Doped Diamond thin Films Grown on Fused Silica
Abstract A conductive boron-doped diamond (BDD) grown on a fused silica/quartz has been investigated. Diamond thin films were deposited by the microwave plasma enhanced chemical vapor deposition (MW PECVD). The main parameters of the BDD synthesis, i.e. the methane admixture and the substrate temper...
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| Format: | Article |
| Language: | English |
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Polish Academy of Sciences
2014-12-01
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| Series: | Metrology and Measurement Systems |
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| Online Access: | http://www.degruyter.com/view/j/mms.2014.21.issue-4/mms-2014-0059/mms-2014-0059.xml?format=INT |