Collimation Sensing With Differential Grating and Talbot Interferometry
The collimation of monochromatic light in optical metrology is of great importance for its determination of the accuracy of physical measurement. This paper proposes a novel collimation testing method with the differential grating (DG) characterized by its high sensitivity. In the process of measure...
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doaj-b9d7372544bb491495d730be025387912021-03-29T17:17:39ZengIEEEIEEE Photonics Journal1943-06552014-01-016311010.1109/JPHOT.2014.23176786799212Collimation Sensing With Differential Grating and Talbot InterferometryNan Wang0Yan Tang1Wei Jiang2Wei Yan3Song Hu4<formula formulatype="inline"><tex Notation="TeX">$^{1}$</tex></formula> State Key Laboratory of Optical Technologies for Microfabrication, The Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, ChinaState Key Laboratory of Optical Technologies for Microfabrication, The Institute of Optics and Electronics , Chinese Academy of Sciences, Chengdu, ChinaState Key Laboratory of Optical Technologies for Microfabrication, The Institute of Optics and Electronics , Chinese Academy of Sciences, Chengdu, ChinaState Key Laboratory of Optical Technologies for Microfabrication, The Institute of Optics and Electronics , Chinese Academy of Sciences, Chengdu, ChinaState Key Laboratory of Optical Technologies for Microfabrication, The Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, ChinaThe collimation of monochromatic light in optical metrology is of great importance for its determination of the accuracy of physical measurement. This paper proposes a novel collimation testing method with the differential grating (DG) characterized by its high sensitivity. In the process of measurement, the monochromatic light is incident upon a linear grating and is then projected onto a DG to create two sets of linear moiré fringes. By analyzing the relationship between the phase of moiré fringes and the divergence or convergence angle, the collimation of monochromatic light can be easily measured. Compared with the traditional collimation methods, this method is more accurate with an experimental accuracy of 10<sup>-7</sup> rad , which is in good agreement with the theoretical prediction.https://ieeexplore.ieee.org/document/6799212/Collimation testingmoiré fringedifferential grating |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
Nan Wang Yan Tang Wei Jiang Wei Yan Song Hu |
spellingShingle |
Nan Wang Yan Tang Wei Jiang Wei Yan Song Hu Collimation Sensing With Differential Grating and Talbot Interferometry IEEE Photonics Journal Collimation testing moiré fringe differential grating |
author_facet |
Nan Wang Yan Tang Wei Jiang Wei Yan Song Hu |
author_sort |
Nan Wang |
title |
Collimation Sensing With Differential Grating and Talbot Interferometry |
title_short |
Collimation Sensing With Differential Grating and Talbot Interferometry |
title_full |
Collimation Sensing With Differential Grating and Talbot Interferometry |
title_fullStr |
Collimation Sensing With Differential Grating and Talbot Interferometry |
title_full_unstemmed |
Collimation Sensing With Differential Grating and Talbot Interferometry |
title_sort |
collimation sensing with differential grating and talbot interferometry |
publisher |
IEEE |
series |
IEEE Photonics Journal |
issn |
1943-0655 |
publishDate |
2014-01-01 |
description |
The collimation of monochromatic light in optical metrology is of great importance for its determination of the accuracy of physical measurement. This paper proposes a novel collimation testing method with the differential grating (DG) characterized by its high sensitivity. In the process of measurement, the monochromatic light is incident upon a linear grating and is then projected onto a DG to create two sets of linear moiré fringes. By analyzing the relationship between the phase of moiré fringes and the divergence or convergence angle, the collimation of monochromatic light can be easily measured. Compared with the traditional collimation methods, this method is more accurate with an experimental accuracy of 10<sup>-7</sup> rad , which is in good agreement with the theoretical prediction. |
topic |
Collimation testing moiré fringe differential grating |
url |
https://ieeexplore.ieee.org/document/6799212/ |
work_keys_str_mv |
AT nanwang collimationsensingwithdifferentialgratingandtalbotinterferometry AT yantang collimationsensingwithdifferentialgratingandtalbotinterferometry AT weijiang collimationsensingwithdifferentialgratingandtalbotinterferometry AT weiyan collimationsensingwithdifferentialgratingandtalbotinterferometry AT songhu collimationsensingwithdifferentialgratingandtalbotinterferometry |
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1724197994955276288 |