Collimation Sensing With Differential Grating and Talbot Interferometry

The collimation of monochromatic light in optical metrology is of great importance for its determination of the accuracy of physical measurement. This paper proposes a novel collimation testing method with the differential grating (DG) characterized by its high sensitivity. In the process of measure...

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Main Authors: Nan Wang, Yan Tang, Wei Jiang, Wei Yan, Song Hu
Format: Article
Language:English
Published: IEEE 2014-01-01
Series:IEEE Photonics Journal
Subjects:
Online Access:https://ieeexplore.ieee.org/document/6799212/
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spelling doaj-b9d7372544bb491495d730be025387912021-03-29T17:17:39ZengIEEEIEEE Photonics Journal1943-06552014-01-016311010.1109/JPHOT.2014.23176786799212Collimation Sensing With Differential Grating and Talbot InterferometryNan Wang0Yan Tang1Wei Jiang2Wei Yan3Song Hu4<formula formulatype="inline"><tex Notation="TeX">$^{1}$</tex></formula> State Key Laboratory of Optical Technologies for Microfabrication, The Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, ChinaState Key Laboratory of Optical Technologies for Microfabrication, The Institute of Optics and Electronics , Chinese Academy of Sciences, Chengdu, ChinaState Key Laboratory of Optical Technologies for Microfabrication, The Institute of Optics and Electronics , Chinese Academy of Sciences, Chengdu, ChinaState Key Laboratory of Optical Technologies for Microfabrication, The Institute of Optics and Electronics , Chinese Academy of Sciences, Chengdu, ChinaState Key Laboratory of Optical Technologies for Microfabrication, The Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, ChinaThe collimation of monochromatic light in optical metrology is of great importance for its determination of the accuracy of physical measurement. This paper proposes a novel collimation testing method with the differential grating (DG) characterized by its high sensitivity. In the process of measurement, the monochromatic light is incident upon a linear grating and is then projected onto a DG to create two sets of linear moire&#x0301; fringes. By analyzing the relationship between the phase of moire&#x0301; fringes and the divergence or convergence angle, the collimation of monochromatic light can be easily measured. Compared with the traditional collimation methods, this method is more accurate with an experimental accuracy of 10<sup>-7</sup> rad , which is in good agreement with the theoretical prediction.https://ieeexplore.ieee.org/document/6799212/Collimation testingmoir&#x00E9; fringedifferential grating
collection DOAJ
language English
format Article
sources DOAJ
author Nan Wang
Yan Tang
Wei Jiang
Wei Yan
Song Hu
spellingShingle Nan Wang
Yan Tang
Wei Jiang
Wei Yan
Song Hu
Collimation Sensing With Differential Grating and Talbot Interferometry
IEEE Photonics Journal
Collimation testing
moir&#x00E9; fringe
differential grating
author_facet Nan Wang
Yan Tang
Wei Jiang
Wei Yan
Song Hu
author_sort Nan Wang
title Collimation Sensing With Differential Grating and Talbot Interferometry
title_short Collimation Sensing With Differential Grating and Talbot Interferometry
title_full Collimation Sensing With Differential Grating and Talbot Interferometry
title_fullStr Collimation Sensing With Differential Grating and Talbot Interferometry
title_full_unstemmed Collimation Sensing With Differential Grating and Talbot Interferometry
title_sort collimation sensing with differential grating and talbot interferometry
publisher IEEE
series IEEE Photonics Journal
issn 1943-0655
publishDate 2014-01-01
description The collimation of monochromatic light in optical metrology is of great importance for its determination of the accuracy of physical measurement. This paper proposes a novel collimation testing method with the differential grating (DG) characterized by its high sensitivity. In the process of measurement, the monochromatic light is incident upon a linear grating and is then projected onto a DG to create two sets of linear moire&#x0301; fringes. By analyzing the relationship between the phase of moire&#x0301; fringes and the divergence or convergence angle, the collimation of monochromatic light can be easily measured. Compared with the traditional collimation methods, this method is more accurate with an experimental accuracy of 10<sup>-7</sup> rad , which is in good agreement with the theoretical prediction.
topic Collimation testing
moir&#x00E9; fringe
differential grating
url https://ieeexplore.ieee.org/document/6799212/
work_keys_str_mv AT nanwang collimationsensingwithdifferentialgratingandtalbotinterferometry
AT yantang collimationsensingwithdifferentialgratingandtalbotinterferometry
AT weijiang collimationsensingwithdifferentialgratingandtalbotinterferometry
AT weiyan collimationsensingwithdifferentialgratingandtalbotinterferometry
AT songhu collimationsensingwithdifferentialgratingandtalbotinterferometry
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