Collimation Sensing With Differential Grating and Talbot Interferometry
The collimation of monochromatic light in optical metrology is of great importance for its determination of the accuracy of physical measurement. This paper proposes a novel collimation testing method with the differential grating (DG) characterized by its high sensitivity. In the process of measure...
Main Authors: | , , , , |
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Format: | Article |
Language: | English |
Published: |
IEEE
2014-01-01
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Series: | IEEE Photonics Journal |
Subjects: | |
Online Access: | https://ieeexplore.ieee.org/document/6799212/ |