Synthesis and structural analysis of Mo/B periodical multilayer X-ray mirrors for beyond extreme ultraviolet optics

Synthesis and structural analysis of Mo/B periodical multilayer X-ray mirrors for beyond extreme ultraviolet optics

The synthesis and structural analysis of Mo/B periodical multilayer X-ray mirrors (PMMs) for beyond extreme ultraviolet (BEUV) optics was performed. The PMMs were deposited by a combination of pulsed DC and radio frequency (RF) magnetron sputtering. The structure was analyzed by high-resolution tran...

Full description

Bibliographic Details
Main Authors:	Oleksiy V. Penkov, Igor A. Kopylets, Valeriy V. Kondratenko, Mahdi Khadem
Format:	Article
Language:	English
Published:	Elsevier 2021-01-01
Series:	Materials & Design
Subjects:	Beyond extreme ultraviolet (BEUV) Periodical multilayer x-ray mirror Magnetron sputtering Boron Molybdenum X-ray diffraction
Online Access:	http://www.sciencedirect.com/science/article/pii/S0264127520308546

Similar Items

Attosecond Pulse Shaping by Multilayer Mirrors
by: Alexander Guggenmos, et al.
Published: (2018-12-01)

Materials Science of Multilayer X-ray Mirrors
by: Ghafoor, Naureen
Published: (2008)

Growth of Pt/Mg Multilayer X-ray Mirrors : Effects of Sputter Yield Amplification
by: Sohail, Hafiz Muhammad
Published: (2009)

Multilayer Mirror Based High-Resolution Solar Soft X-Ray Spectrometer
by: S. S. Panini, et al.
Published: (2021-07-01)

Assessment of Potential of the High-Voltage Anodic Plasma Source to Deposit Multilayer Structures Relevant to X-ray Mirror Applications
by: Aurel-Mihai Vlaicu, et al.
Published: (2020-05-01)

Growth and Nano-structural Studies of Metallic Multilayer for X-ray Mirrors
by: Ghafoor, Naureen
Published: (2005)

Impact of structure on mechanical properties and oxidation behavior of magnetron sputtered cubic and hexagonal MoNx thin films
by: Wolfgang Tillmann, et al.
Published: (2021-09-01)

Multilayer mirror systems to form hard X-ray beams
by: Akhsakhalyan Anton, et al.
Published: (2005-06-01)

Soft X-ray Multilayers As Polarizing Elements : Fabrication, And Studies Of Surfaces And Interfaces
by: Nayak, Maheswar
Published: (2010)

Reflection optimization of nano-multilayer X-ray mirrors in three-edge energies: Cr-Kα, Co-Kα, and Ti-Kα
by: H Ghavidel, et al.
Published: (2017-08-01)

Periodic Multilayer for X-ray Spectroscopy in the Li K Range
by: Vladimir Polkonikov, et al.
Published: (2021-07-01)

Structure and tribo-mechanical properties of Si- and W-containing amorphous carbon based multilayers
by: Wolfgang Tillmann, et al.
Published: (2021-09-01)

X-Ray Calc: A software for the simulation of X-ray reflectivity
by: Oleksiy V. Penkov, et al.
Published: (2020-07-01)

Influence of X-ray irradiation on the optical absorption edge and refractive index dispersion in Cu6PS5I-based thin films deposited using magnetron sputtering
by: I.P. Studenyak, et al.
Published: (2017-07-01)

On the Microstructure and Mechanical Properties of CrN<sub>x</sub>/Ag Multilayer Films Prepared by Magnetron Sputtering
by: Chunfu Hong, et al.
Published: (2020-03-01)

X-ray Single-Grating Interferometry for Wavefront Measurement and Correction of Hard X-ray Nanofocusing Mirrors
by: Jumpei Yamada, et al.
Published: (2020-12-01)

Effects of N2 Partial Pressure on Growth, Structure, and Optical Properties of GaN Nanorods Deposited by Liquid-Target Reactive Magnetron Sputter Epitaxy
by: Muhammad Junaid, et al.
Published: (2018-04-01)

Theory of Reflective X-Ray Multilayer Structures with Graded Period and its Applications
by: Feshchenko, R.M
Published: (2022)

Deposition of Al/Cu Multilayer By Double Targets Cylindrical DC Magnetron Sputtering System
by: P. Balashabadi, et al.
Published: (2013-12-01)

Prism-based scanning X-ray microscopy
by: Kenneth Evans-Lutterodt
Published: (2021-09-01)

Hard X-ray nanoprobe scanner
by: Jumpei Yamada, et al.
Published: (2021-09-01)

CoCrFeNi High-Entropy Alloy Thin Films Synthesised by Magnetron Sputter Deposition from Spark Plasma Sintered Targets
by: Holger Schwarz, et al.
Published: (2021-04-01)

Surface Stoichiometry and Depth Profile of Ti<sub><i>x</i></sub>-Cu<sub><i>y</i></sub>N<sub><i>z</i></sub> Thin Films Deposited by Magnetron Sputtering
by: Arun Kumar Mukhopadhyay, et al.
Published: (2021-06-01)

Extending resonant inelastic X-ray scattering to the extreme ultraviolet
by: L. Andrew eWray, et al.
Published: (2015-05-01)

Aging Effect on Functionalized Silver-Based Nanocoating Braided Coronary Stents
by: Rita Rebelo, et al.
Published: (2020-12-01)

POSSIBILITY OF THE METASTABLE Al2O3 PHASE FORMATION Al3Si IN COMPOSITE Al-Si FILMS OBTAINED BY ION-BEAM AND MAGNETRON SPUTTERING
by: Vladimir A. Terekhov, et al.
Published: (2018-03-01)

Structure, Surface Morphology, Chemical Composition, and Sensing Properties of SnO<sub>2</sub> Thin Films in an Oxidizing Atmosphere
by: Weronika Izydorczyk, et al.
Published: (2021-08-01)

Improvement of the Microstructure and X-ray Performance of Ultrathin Ru/C Multilayer Mirror after High Temperature Treatment
by: Yang Liu, et al.
Published: (2021-01-01)

Advanced x-ray multilayer waveguide optics
by: Zhong, Qi
Published: (2017)

Image Plane Holographic Microscopy With a Table-Top Soft X-Ray Laser
by: J. Nejdl, et al.
Published: (2015-01-01)

Micromachined Silicon Platform for Precise Assembly of 2D Multilayer Laue Lenses for High-Resolution X-ray Microscopy
by: Wei Xu, et al.
Published: (2020-10-01)

Evolution of the Internal Structure of Short-Period Cr/V Multilayers with Different Vanadium Layers Thicknesses
by: Runze Qi, et al.
Published: (2019-09-01)

On the Properties of WC/SiC Multilayers
by: Mauro Prasciolu, et al.
Published: (2018-04-01)

Multilayer optics for XUV spectral region: technology fabrication and applications
by: Andreev S., et al.
Published: (2003-03-01)

Short range order and development of long range order in nickel - 20 atomic percent molybdenum alloy
by: Chakravarti, Bhaven
Published: (2006)

X-Ray Photoelectron Spectroscopy Depth Profiling of As-Grown and Annealed Titanium Nitride Thin Films
by: Monzer Maarouf, et al.
Published: (2021-02-01)

Solid solution or amorphous phase formation in TiZr-based ternary to quinternary multi-principal-element films
by: Mariana Braic, et al.
Published: (2014-08-01)

STRUCTURE OF COMPOSITES BASED ON MULTI-WALL CARBON NANOTUBES AND TIN OXIDE
by: Sergey N. Nesov, et al.
Published: (2018-06-01)

Breakthroughs in Photonics 2013: X-Ray Optics
by: Regina Soufli
Published: (2014-01-01)

Influence of Electron Beam Treatment of Co–Cr Alloy on the Growing Mechanism, Surface Topography, and Mechanical Properties of Deposited TiN/TiO<sub>2</sub> Coatings
by: Stefan Valkov, et al.
Published: (2019-08-01)

Cannot write session to /tmp/vufind_sessions/sess_d9m11hvqu2a453lr65t8s41avp