Integrated amorphous silicon-aluminum long-range surface plasmon polariton (LR-SPP) waveguides

Integrated amorphous silicon-aluminum long-range surface plasmon polariton (LR-SPP) waveguides

We demonstrate the design, fabrication, and experimental characterization of a long range surface plasmon polariton waveguide that is compatible with complementary metal-oxide semiconductor backend technology. The structure consists of a thin aluminum strip embedded in amorphous silicon. This config...

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Bibliographic Details
Main Authors:	Boaz Sturlesi, Meir Grajower, Noa Mazurski, Uriel Levy
Format:	Article
Language:	English
Published:	AIP Publishing LLC 2018-03-01
Series:	APL Photonics
Online Access:	http://dx.doi.org/10.1063/1.5013662

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