Point-Mass Model for Nano-Patterning Using Dip-Pen Nanolithography (DPN)
Micro-cantilevers are frequently used as scanning probes and sensors in micro-electromechanical systems (MEMS). Usually micro-cantilever based sensors operate by detecting changes in cantilever vibration modes (e.g., bending or torsional vibration frequency) or surface stresses - when a target analy...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2011-04-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/april_2011/P_SI_151.pdf |