The Effect of Trimethylaluminum Flow Rate on the Structure and Optical Properties of AlInGaN Quaternary Epilayers

The Effect of Trimethylaluminum Flow Rate on the Structure and Optical Properties of AlInGaN Quaternary Epilayers

In this work, a series of quaternary AlxInyGa1−x−yN thin films have been successfully achieved using metal organic chemical vapor deposition (MOCVD) method with adjustable trimethylaluminum (TMA) flows. Surface morphology and optical properties of AlxInyGa1−x−yN films have been evaluated. The indium...

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Bibliographic Details
Main Authors:	Dongbo Wang, Gang Liu, Shujie Jiao, Lingping Kong, Teren Liu, Tong Liu, Jinzhong Wang, Fengyun Guo, Chunyang Luan, Zhenghao Li
Format:	Article
Language:	English
Published:	MDPI AG 2017-03-01
Series:	Crystals
Subjects:	trimethylaluminum flows AlInGaN alloys photoluminescence
Online Access:	http://www.mdpi.com/2073-4352/7/3/69

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