Preparation of superior IGZO ceramics by two-step sintering for application in IGZO thin film fabrication

Preparation of superior IGZO ceramics by two-step sintering for application in IGZO thin film fabrication

The preparation method of advanced ceramics that serve as target materials, has been the key challenge to produce high quality thin film transistors (TFTs) with the desired properties. In this study, a novel two-step sintering (TSS) process was successfully applied to fabricate indium gallium zinc o...

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Bibliographic Details
Main Authors: Yang Liu, Benshuang Sun, Yongchun Shu, Xueyun Zeng, Jinpeng Zhu, Jianhong Yi, Jilin He
Format: Article
Language:English
Published: Elsevier 2020-05-01
Series:Journal of Materials Research and Technology
Subjects:
IGZO ceramics
Two-step sintering
Grain size
Thin films
Resistivity
Online Access:http://www.sciencedirect.com/science/article/pii/S2238785419320538

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