MEMS Acoustic Emission Sensors

MEMS Acoustic Emission Sensors

This paper presents a review of state-of-the-art micro-electro-mechanical-systems (MEMS) acoustic emission (AE) sensors. MEMS AE sensors are designed to detect active defects in materials with the transduction mechanisms of piezoresistivity, capacitance or piezoelectricity. The majority of MEMS AE s...

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Bibliographic Details
Main Author:	Didem Ozevin
Format:	Article
Language:	English
Published:	MDPI AG 2020-12-01
Series:	Applied Sciences
Subjects:	MEMS acoustic emission piezoresistive capacitive piezoelectric
Online Access:	https://www.mdpi.com/2076-3417/10/24/8966

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