Lithography-Free, Low-Cost Method for Improving Photodiode Performance by Etching Silicon Nanocones as Antireflection Layer

Lithography-Free, Low-Cost Method for Improving Photodiode Performance by Etching Silicon Nanocones as Antireflection Layer

A three-step process has been demonstrated to improve the performance of photodiode by creating nanocone forest on the surface of photodiode as an antireflection layer. This high-throughput, low-cost process has been shown to decrease the reflectivity by 66.1%, enhance the quantum efficiency by 27%,...

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Bibliographic Details
Main Authors: Jing Jiang, Zhida Xu, Jiahao Lin, Gang Logan Liu
Format: Article
Language:English
Published: Hindawi Limited 2016-01-01
Series:Journal of Sensors
Online Access:http://dx.doi.org/10.1155/2016/4019864
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spelling doaj-b652514daa1147f28330c36814a9289d2020-11-24T22:26:45ZengHindawi LimitedJournal of Sensors1687-725X1687-72682016-01-01201610.1155/2016/40198644019864Lithography-Free, Low-Cost Method for Improving Photodiode Performance by Etching Silicon Nanocones as Antireflection LayerJing Jiang0Zhida Xu1Jiahao Lin2Gang Logan Liu3Department of Electrical and Computer Engineering, University of Illinois at Urbana-Champaign, Urbana, IL 61801, USADepartment of Electrical and Computer Engineering, University of Illinois at Urbana-Champaign, Urbana, IL 61801, USADepartment of Electrical and Computer Engineering, University of Illinois at Urbana-Champaign, Urbana, IL 61801, USADepartment of Electrical and Computer Engineering, University of Illinois at Urbana-Champaign, Urbana, IL 61801, USAA three-step process has been demonstrated to improve the performance of photodiode by creating nanocone forest on the surface of photodiode as an antireflection layer. This high-throughput, low-cost process has been shown to decrease the reflectivity by 66.1%, enhance the quantum efficiency by 27%, and increase the responsivity by 25.7%. This low-cost manufacture process can be applied to increase the responsivity of silicon based photonic devices.http://dx.doi.org/10.1155/2016/4019864
collection DOAJ
language English
format Article
sources DOAJ
author Jing Jiang
Zhida Xu
Jiahao Lin
Gang Logan Liu
spellingShingle Jing Jiang
Zhida Xu
Jiahao Lin
Gang Logan Liu
Lithography-Free, Low-Cost Method for Improving Photodiode Performance by Etching Silicon Nanocones as Antireflection Layer
Journal of Sensors
author_facet Jing Jiang
Zhida Xu
Jiahao Lin
Gang Logan Liu
author_sort Jing Jiang
title Lithography-Free, Low-Cost Method for Improving Photodiode Performance by Etching Silicon Nanocones as Antireflection Layer
title_short Lithography-Free, Low-Cost Method for Improving Photodiode Performance by Etching Silicon Nanocones as Antireflection Layer
title_full Lithography-Free, Low-Cost Method for Improving Photodiode Performance by Etching Silicon Nanocones as Antireflection Layer
title_fullStr Lithography-Free, Low-Cost Method for Improving Photodiode Performance by Etching Silicon Nanocones as Antireflection Layer
title_full_unstemmed Lithography-Free, Low-Cost Method for Improving Photodiode Performance by Etching Silicon Nanocones as Antireflection Layer
title_sort lithography-free, low-cost method for improving photodiode performance by etching silicon nanocones as antireflection layer
publisher Hindawi Limited
series Journal of Sensors
issn 1687-725X
1687-7268
publishDate 2016-01-01
description A three-step process has been demonstrated to improve the performance of photodiode by creating nanocone forest on the surface of photodiode as an antireflection layer. This high-throughput, low-cost process has been shown to decrease the reflectivity by 66.1%, enhance the quantum efficiency by 27%, and increase the responsivity by 25.7%. This low-cost manufacture process can be applied to increase the responsivity of silicon based photonic devices.
url http://dx.doi.org/10.1155/2016/4019864
work_keys_str_mv AT jingjiang lithographyfreelowcostmethodforimprovingphotodiodeperformancebyetchingsiliconnanoconesasantireflectionlayer
AT zhidaxu lithographyfreelowcostmethodforimprovingphotodiodeperformancebyetchingsiliconnanoconesasantireflectionlayer
AT jiahaolin lithographyfreelowcostmethodforimprovingphotodiodeperformancebyetchingsiliconnanoconesasantireflectionlayer
AT gangloganliu lithographyfreelowcostmethodforimprovingphotodiodeperformancebyetchingsiliconnanoconesasantireflectionlayer
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