Impacts of Residual Stress on Micro Vibratory Platform Used for Inertial Sensor Calibration

A micro vibratory platform driven by converse piezoelectric effects is a promising in-situ recalibration platform to eliminate the influence of bias and scale factor drift caused by long-term storage of micro-electro–mechanical system (MEMS) inertial sensors. The calibration accuracy is critically d...

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Main Authors:	Rui Hao, Huijun Yu, Bei Peng, Haixiang Zhan, Wu Zhou
Format:	Article
Language:	English
Published:	MDPI AG 2020-07-01
Series:	Sensors
Subjects:	micro vibratory platform inertial sensor calibration residual stress PZT hysteresis
Online Access:	https://www.mdpi.com/1424-8220/20/14/3959

id	doaj-b5bb9e7297c240d093fa463228bbf41b
record_format	Article
spelling	doaj-b5bb9e7297c240d093fa463228bbf41b2020-11-25T02:53:51ZengMDPI AGSensors1424-82202020-07-01203959395910.3390/s20143959Impacts of Residual Stress on Micro Vibratory Platform Used for Inertial Sensor CalibrationRui Hao0Huijun Yu1Bei Peng2Haixiang Zhan3Wu Zhou4School of Mechanical and Electrical Engineering, University of Electronic Science and Technology of China, Chengdu 611731, ChinaSchool of Mechanical and Electrical Engineering, University of Electronic Science and Technology of China, Chengdu 611731, ChinaSchool of Mechanical and Electrical Engineering, University of Electronic Science and Technology of China, Chengdu 611731, ChinaSchool of Mechanical and Electrical Engineering, University of Electronic Science and Technology of China, Chengdu 611731, ChinaSchool of Mechanical and Electrical Engineering, University of Electronic Science and Technology of China, Chengdu 611731, ChinaA micro vibratory platform driven by converse piezoelectric effects is a promising in-situ recalibration platform to eliminate the influence of bias and scale factor drift caused by long-term storage of micro-electro–mechanical system (MEMS) inertial sensors. The calibration accuracy is critically determined by the stable and repeatable vibration of platform, and it is unavoidably impacted by the residual stress of micro structures and lead zirconate titanate (PZT) hysteresis. The abnormal phenomenon of the observed displacement response in experiments was investigated analytically using the stiffness model of beams and hysteresis model of piezoelectric material. Rather than the hysteresis, the initial deflection formed by the residual stress of the beam was identified as the main cause of the response error around the zero position. This conclusion provides guidelines to improve the performance and control of micro vibratory platforms.https://www.mdpi.com/1424-8220/20/14/3959micro vibratory platforminertial sensor calibrationresidual stressPZT hysteresis
collection	DOAJ
language	English
format	Article
sources	DOAJ
author	Rui Hao Huijun Yu Bei Peng Haixiang Zhan Wu Zhou
spellingShingle	Rui Hao Huijun Yu Bei Peng Haixiang Zhan Wu Zhou Impacts of Residual Stress on Micro Vibratory Platform Used for Inertial Sensor Calibration Sensors micro vibratory platform inertial sensor calibration residual stress PZT hysteresis
author_facet	Rui Hao Huijun Yu Bei Peng Haixiang Zhan Wu Zhou
author_sort	Rui Hao
title	Impacts of Residual Stress on Micro Vibratory Platform Used for Inertial Sensor Calibration
title_short	Impacts of Residual Stress on Micro Vibratory Platform Used for Inertial Sensor Calibration
title_full	Impacts of Residual Stress on Micro Vibratory Platform Used for Inertial Sensor Calibration
title_fullStr	Impacts of Residual Stress on Micro Vibratory Platform Used for Inertial Sensor Calibration
title_full_unstemmed	Impacts of Residual Stress on Micro Vibratory Platform Used for Inertial Sensor Calibration
title_sort	impacts of residual stress on micro vibratory platform used for inertial sensor calibration
publisher	MDPI AG
series	Sensors
issn	1424-8220
publishDate	2020-07-01
description	A micro vibratory platform driven by converse piezoelectric effects is a promising in-situ recalibration platform to eliminate the influence of bias and scale factor drift caused by long-term storage of micro-electro–mechanical system (MEMS) inertial sensors. The calibration accuracy is critically determined by the stable and repeatable vibration of platform, and it is unavoidably impacted by the residual stress of micro structures and lead zirconate titanate (PZT) hysteresis. The abnormal phenomenon of the observed displacement response in experiments was investigated analytically using the stiffness model of beams and hysteresis model of piezoelectric material. Rather than the hysteresis, the initial deflection formed by the residual stress of the beam was identified as the main cause of the response error around the zero position. This conclusion provides guidelines to improve the performance and control of micro vibratory platforms.
topic	micro vibratory platform inertial sensor calibration residual stress PZT hysteresis
url	https://www.mdpi.com/1424-8220/20/14/3959
work_keys_str_mv	AT ruihao impactsofresidualstressonmicrovibratoryplatformusedforinertialsensorcalibration AT huijunyu impactsofresidualstressonmicrovibratoryplatformusedforinertialsensorcalibration AT beipeng impactsofresidualstressonmicrovibratoryplatformusedforinertialsensorcalibration AT haixiangzhan impactsofresidualstressonmicrovibratoryplatformusedforinertialsensorcalibration AT wuzhou impactsofresidualstressonmicrovibratoryplatformusedforinertialsensorcalibration
_version_	1724724009256353792

Impacts of Residual Stress on Micro Vibratory Platform Used for Inertial Sensor Calibration

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