Compact Laser Collimation System for Simultaneous Measurement of Five-Degree-of-Freedom Motion Errors

A compact laser collimation system is presented for the simultaneous measurement of five-degree-of-freedom motion errors. The optical configuration of the proposed system is designed, and the principle of the measurement of five-degree-of-freedom errors is described in detail. The resolution of the...

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Bibliographic Details
Main Authors: Chuang Sun, Sheng Cai, Yusheng Liu, Yanfeng Qiao
Format: Article
Language:English
Published: MDPI AG 2020-07-01
Series:Applied Sciences
Subjects:
Online Access:https://www.mdpi.com/2076-3417/10/15/5057