Selective Wet-Etching of Amorphous/Crystallized Sb-Se Thin Films

Selective Wet-Etching of Amorphous/Crystallized Sb-Se Thin Films

Bibliographic Details
Main Authors: Shiman O., Gerbreders V., Sledevskis E., Bulanovs A.
Format: Article
Language:English
Published: Sciendo 2012-01-01
Series:Latvian Journal of Physics and Technical Sciences
Subjects:
chalcogenide thin film
amorphous and crystalline phases
etching rate
Online Access:https://doi.org/10.2478/v10047-012-0010-8
Description
ISSN:0868-8257

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