Modification of the Properties of Vanadium Oxide Thin Films by Plasma-Immersion Ion Implantation

Modification of the Properties of Vanadium Oxide Thin Films by Plasma-Immersion Ion Implantation

The paper describes the effect of doping with hydrogen and tungsten by means of plasma-immersion ion implantation (PIII) on the properties of vanadium dioxide and hydrated vanadium pentoxide films. It is shown that the parameters of the metal-insulator phase transition in VO2 thin films depend on th...

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Bibliographic Details
Main Authors:	Sergey Burdyukh, Olga Berezina, Alexander Pergament
Format:	Article
Language:	English
Published:	Hindawi Limited 2018-01-01
Series:	Advances in Condensed Matter Physics
Online Access:	http://dx.doi.org/10.1155/2018/9789370

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