Effect of Polyimide Variation and its Curing Temperature on CMOS Based Capacitive Humidity Sensor and Characterization of Integrated Heater

Effect of Polyimide Variation and its Curing Temperature on CMOS Based Capacitive Humidity Sensor and Characterization of Integrated Heater

This paper reports humidity sensor using CMOS fabrication technology integrated with micro heater. Vertical capacitive sensor has been chosen having better nominal capacitance. Three different variants of micro heaters were fabricated and compared on both TiN and Poly-phosphorous doped silicon. The...

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Bibliographic Details
Main Authors: B. N. Baliga, D. N. Tiwari, Kamaljeet Singh, Sanjay Verma, K. Nagachenchaiah
Format: Article
Language:English
Published: IFSA Publishing, S.L. 2009-04-01
Series:Sensors & Transducers
Subjects:
Bulk-micromachining
Capacitive sensor
Polyimide
Micro-heater
Online Access:http://www.sensorsportal.com/HTML/DIGEST/april_09/P_421.pdf

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