GaN epitaxial layers grown on multilayer graphene by MOCVD
In this study, GaN epitaxial layers were successfully deposited on a multilayer graphene (MLG) by using metal-organic chemical vapor deposition (MOCVD). Highly crystalline orientations of the GaN films were confirmed through electron backscatter diffraction (EBSD). An epitaxial relationship between...
Main Authors: | , , , , , , , , , |
---|---|
Format: | Article |
Language: | English |
Published: |
AIP Publishing LLC
2018-04-01
|
Series: | AIP Advances |
Online Access: | http://dx.doi.org/10.1063/1.5025899 |