Temperature Effects on the Propagation Characteristics of Love Waves along Multi-Guide Layers of Sio<sub>2</sub>/Su-8 on St-90°X Quartz

Temperature Effects on the Propagation Characteristics of Love Waves along Multi-Guide Layers of Sio<sub>2</sub>/Su-8 on St-90°X Quartz

Theoretical calculations have been performed on the temperature effects on the propagation characteristics of Love waves in layered structures by solving the coupled electromechanical field equations, and the optimal design parameters were extracted for temperature stability improvement. Based on th...

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Bibliographic Details
Main Authors: Fangqian Xu, Wen Wang, Jiaoli Hou, Minghua Liu
Format: Article
Language:English
Published: MDPI AG 2012-05-01
Series:Sensors
Subjects:
Love wave
multi-guide
SU-8
SiO<sub>2</sub>
ST-90°X quartz
<em>Tcf</em>
Online Access:http://www.mdpi.com/1424-8220/12/6/7337
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spelling doaj-b1ca29e406f642e289dc41d02f5f50a22020-11-24T21:08:42ZengMDPI AGSensors1424-82202012-05-011267337734910.3390/s120607337Temperature Effects on the Propagation Characteristics of Love Waves along Multi-Guide Layers of Sio<sub>2</sub>/Su-8 on St-90°X QuartzFangqian XuWen WangJiaoli HouMinghua LiuTheoretical calculations have been performed on the temperature effects on the propagation characteristics of Love waves in layered structures by solving the coupled electromechanical field equations, and the optimal design parameters were extracted for temperature stability improvement. Based on the theoretical analysis, excellent temperature coefficient of frequency (<em>Tcf</em>) of the fabricated Love wave devices with guide layers of SU-8/SiO<sub>2</sub> on ST-90°X quartz substrate is evaluated experimentally as only 2.16 ppm.http://www.mdpi.com/1424-8220/12/6/7337Love wavemulti-guideSU-8SiO<sub>2</sub>ST-90°X quartz<em>Tcf</em>
collection DOAJ
language English
format Article
sources DOAJ
author Fangqian Xu
Wen Wang
Jiaoli Hou
Minghua Liu
spellingShingle Fangqian Xu
Wen Wang
Jiaoli Hou
Minghua Liu
Temperature Effects on the Propagation Characteristics of Love Waves along Multi-Guide Layers of Sio<sub>2</sub>/Su-8 on St-90°X Quartz
Sensors
Love wave
multi-guide
SU-8
SiO<sub>2</sub>
ST-90°X quartz
<em>Tcf</em>
author_facet Fangqian Xu
Wen Wang
Jiaoli Hou
Minghua Liu
author_sort Fangqian Xu
title Temperature Effects on the Propagation Characteristics of Love Waves along Multi-Guide Layers of Sio<sub>2</sub>/Su-8 on St-90°X Quartz
title_short Temperature Effects on the Propagation Characteristics of Love Waves along Multi-Guide Layers of Sio<sub>2</sub>/Su-8 on St-90°X Quartz
title_full Temperature Effects on the Propagation Characteristics of Love Waves along Multi-Guide Layers of Sio<sub>2</sub>/Su-8 on St-90°X Quartz
title_fullStr Temperature Effects on the Propagation Characteristics of Love Waves along Multi-Guide Layers of Sio<sub>2</sub>/Su-8 on St-90°X Quartz
title_full_unstemmed Temperature Effects on the Propagation Characteristics of Love Waves along Multi-Guide Layers of Sio<sub>2</sub>/Su-8 on St-90°X Quartz
title_sort temperature effects on the propagation characteristics of love waves along multi-guide layers of sio<sub>2</sub>/su-8 on st-90°x quartz
publisher MDPI AG
series Sensors
issn 1424-8220
publishDate 2012-05-01
description Theoretical calculations have been performed on the temperature effects on the propagation characteristics of Love waves in layered structures by solving the coupled electromechanical field equations, and the optimal design parameters were extracted for temperature stability improvement. Based on the theoretical analysis, excellent temperature coefficient of frequency (<em>Tcf</em>) of the fabricated Love wave devices with guide layers of SU-8/SiO<sub>2</sub> on ST-90°X quartz substrate is evaluated experimentally as only 2.16 ppm.
topic Love wave
multi-guide
SU-8
SiO<sub>2</sub>
ST-90°X quartz
<em>Tcf</em>
url http://www.mdpi.com/1424-8220/12/6/7337
work_keys_str_mv AT fangqianxu temperatureeffectsonthepropagationcharacteristicsoflovewavesalongmultiguidelayersofsioltsubgt2ltsubgtsu8onst90xquartz
AT wenwang temperatureeffectsonthepropagationcharacteristicsoflovewavesalongmultiguidelayersofsioltsubgt2ltsubgtsu8onst90xquartz
AT jiaolihou temperatureeffectsonthepropagationcharacteristicsoflovewavesalongmultiguidelayersofsioltsubgt2ltsubgtsu8onst90xquartz
AT minghualiu temperatureeffectsonthepropagationcharacteristicsoflovewavesalongmultiguidelayersofsioltsubgt2ltsubgtsu8onst90xquartz
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