Silicon-On-Nothing Micro-Pirani Gauge for Interior-Pressure Measurement

Silicon-On-Nothing Micro-Pirani Gauge for Interior-Pressure Measurement

In the current work, we present a compact and cost effective Pirani gauge based on Silicon-On-Nothing (SON) technology. The proposed design uses an innovative approach of etching the sensing element directly in a crystalline silicon membrane. Such configuration allows pressure dependent heat losses...

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Bibliographic Details
Main Authors: Andrey Kravchenko, Vladislav Komenko, Wolf-Joachim Fischer
Format: Article
Language:English
Published: MDPI AG 2018-11-01
Series:Proceedings
Subjects:
MEMS
CMOS
Silicon-On-Nothing
Pirani-gauge
process characterization
outgassing
thermal stability
Online Access:https://www.mdpi.com/2504-3900/2/13/1079

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