Silicon-On-Nothing Micro-Pirani Gauge for Interior-Pressure Measurement

• Main Authors: Andrey Kravchenko, Vladislav Komenko, Wolf-Joachim Fischer
• Format: Article
• Language: English
• Published: MDPI AG 2018-11-01
• Series: Proceedings
• Subjects: MEMS; CMOS; Silicon-On-Nothing; Pirani-gauge; process characterization; outgassing; thermal stability
• Online Access: https://www.mdpi.com/2504-3900/2/13/1079

In the current work, we present a compact and cost effective Pirani gauge based on Silicon-On-Nothing (SON) technology. The proposed design uses an innovative approach of etching the sensing element directly in a crystalline silicon membrane. Such configuration allows pressure dependent heat losses to act on the substrate not only through the bottom cavity and trenches but also via the top cavity on the lid, which is formed by means of a sacrificial layer. By ensuring process compatibility with other SON-based MEMS, the proposed device can be used as a tool for cavity pressure monitoring and product support over the whole life cycle of MEMS: ranging from fabrication to calibration during field tests. Performance of the device is investigated based on numerical simulations and measurements. Furthermore, work includes a discussion of the fabrication process along with an additional cavity pressure characterization.