Advances in 3D Sensor Technology by Using Stepper Lithography

Advances in 3D Sensor Technology by Using Stepper Lithography

3D pixel sensors aimed at the upgrades of the ATLAS and CMS experiments at the High Luminosity LHC have small pixel size and pretty dense layouts. In addition, modified 3D designs with small pixel size and trenched electrodes in place of columnar electrodes are being developed to optimize the pixel...

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Bibliographic Details
Main Authors: Maurizio Boscardin, Sara Ferrari, Francesco Ficorella, Adriano Lai, Roberto Mendicino, Marco Meschini, Sabina Ronchin, Md. Arif Abdulla Samy, Gian-Franco Dalla Betta
Format: Article
Language:English
Published: Frontiers Media S.A. 2021-01-01
Series:Frontiers in Physics
Subjects:
3D silicon detectors
stepper
electrical characterisation
fabrication yield
fabrication process
Online Access:https://www.frontiersin.org/articles/10.3389/fphy.2020.625275/full

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