Optical MEMS devices for compact 3D surface imaging cameras
Abstract Implementing 3D surface imaging camera systems into miniaturized devices for a variety of 3D applications such as movement recognition, object sensing, and 3D endoscopy has received great attention over the past decade. Recently, various MEMS techniques enabled the fabrication of key optica...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
SpringerOpen
2019-07-01
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| Series: | Micro and Nano Systems Letters |
| Subjects: | |
| Online Access: | http://link.springer.com/article/10.1186/s40486-019-0087-4 |