Structure and Properties of Zr-Mo-Si-B-(N) Hard Coatings Obtained by d.c. Magnetron Sputtering of ZrB<sub>2</sub>-MoSi<sub>2</sub> Target

Structure and Properties of Zr-Mo-Si-B-(N) Hard Coatings Obtained by d.c. Magnetron Sputtering of ZrB<sub>2</sub>-MoSi<sub>2</sub> Target

Coatings in a Zr-Mo-Si-B-N system were deposited by the magnetron sputtering of ZrB<sub>2</sub>-MoSi<sub>2</sub> targets in argon and nitrogen. The structure of the coatings was investigated using scanning electron microscopy, X-ray diffraction, energy-dispersive spectroscopy...

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Main Authors: Philipp Kiryukhantsev-Korneev, Alina Sytchenko, Yuriy Pogozhev, Stepan Vorotilo, Anton Orekhov, Pavel Loginov, Evgeny Levashov
Format: Article
Language:English
Published: MDPI AG 2021-04-01
Series:Materials
Subjects:
magnetron sputtering
coating
ZrB<sub>2</sub>
MoSi<sub>2</sub>
Zr-Mo-Si-B-(N)
structure
Online Access:https://www.mdpi.com/1996-1944/14/8/1932
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spelling doaj-b0d28d050f5c4a3aacc435a8b8d983032021-04-13T23:02:04ZengMDPI AGMaterials1996-19442021-04-01141932193210.3390/ma14081932Structure and Properties of Zr-Mo-Si-B-(N) Hard Coatings Obtained by d.c. Magnetron Sputtering of ZrB<sub>2</sub>-MoSi<sub>2</sub> TargetPhilipp Kiryukhantsev-Korneev0Alina Sytchenko1Yuriy Pogozhev2Stepan Vorotilo3Anton Orekhov4Pavel Loginov5Evgeny Levashov6Scientific-Educational Center of SHS, National University of Science and Technology “MISiS”, 119049 Moscow, RussiaScientific-Educational Center of SHS, National University of Science and Technology “MISiS”, 119049 Moscow, RussiaScientific-Educational Center of SHS, National University of Science and Technology “MISiS”, 119049 Moscow, RussiaScientific-Educational Center of SHS, National University of Science and Technology “MISiS”, 119049 Moscow, RussiaScientific-Educational Center of SHS, National University of Science and Technology “MISiS”, 119049 Moscow, RussiaScientific-Educational Center of SHS, National University of Science and Technology “MISiS”, 119049 Moscow, RussiaScientific-Educational Center of SHS, National University of Science and Technology “MISiS”, 119049 Moscow, RussiaCoatings in a Zr-Mo-Si-B-N system were deposited by the magnetron sputtering of ZrB<sub>2</sub>-MoSi<sub>2</sub> targets in argon and nitrogen. The structure of the coatings was investigated using scanning electron microscopy, X-ray diffraction, energy-dispersive spectroscopy, and glow-discharge optical emission spectroscopy. Mechanical and tribological properties were measured using nanoindentation and pin-on-disc testing. Oxidation resistance and oxidation kinetics were estimated via annealing in air at 1000–1500 °C and precision weight measurements. We found that the coatings deposited in Ar demonstrate a superior combination of properties, including hardness of 36 GPa, elastic recovery of 84%, a friction coefficient of 0.6, and oxidation resistance at temperatures up to 1200 °C. High oxidation resistance is realized due to the formation of the protective (SiO<sub>2</sub> + ZrO<sub>2</sub>)/SiO<sub>2</sub> oxide layer, which inhibits the diffusion of oxygen into the coating.https://www.mdpi.com/1996-1944/14/8/1932magnetron sputteringcoatingZrB<sub>2</sub>MoSi<sub>2</sub>Zr-Mo-Si-B-(N)structure
collection DOAJ
language English
format Article
sources DOAJ
author Philipp Kiryukhantsev-Korneev
Alina Sytchenko
Yuriy Pogozhev
Stepan Vorotilo
Anton Orekhov
Pavel Loginov
Evgeny Levashov
spellingShingle Philipp Kiryukhantsev-Korneev
Alina Sytchenko
Yuriy Pogozhev
Stepan Vorotilo
Anton Orekhov
Pavel Loginov
Evgeny Levashov
Structure and Properties of Zr-Mo-Si-B-(N) Hard Coatings Obtained by d.c. Magnetron Sputtering of ZrB<sub>2</sub>-MoSi<sub>2</sub> Target
Materials
magnetron sputtering
coating
ZrB<sub>2</sub>
MoSi<sub>2</sub>
Zr-Mo-Si-B-(N)
structure
author_facet Philipp Kiryukhantsev-Korneev
Alina Sytchenko
Yuriy Pogozhev
Stepan Vorotilo
Anton Orekhov
Pavel Loginov
Evgeny Levashov
author_sort Philipp Kiryukhantsev-Korneev
title Structure and Properties of Zr-Mo-Si-B-(N) Hard Coatings Obtained by d.c. Magnetron Sputtering of ZrB<sub>2</sub>-MoSi<sub>2</sub> Target
title_short Structure and Properties of Zr-Mo-Si-B-(N) Hard Coatings Obtained by d.c. Magnetron Sputtering of ZrB<sub>2</sub>-MoSi<sub>2</sub> Target
title_full Structure and Properties of Zr-Mo-Si-B-(N) Hard Coatings Obtained by d.c. Magnetron Sputtering of ZrB<sub>2</sub>-MoSi<sub>2</sub> Target
title_fullStr Structure and Properties of Zr-Mo-Si-B-(N) Hard Coatings Obtained by d.c. Magnetron Sputtering of ZrB<sub>2</sub>-MoSi<sub>2</sub> Target
title_full_unstemmed Structure and Properties of Zr-Mo-Si-B-(N) Hard Coatings Obtained by d.c. Magnetron Sputtering of ZrB<sub>2</sub>-MoSi<sub>2</sub> Target
title_sort structure and properties of zr-mo-si-b-(n) hard coatings obtained by d.c. magnetron sputtering of zrb<sub>2</sub>-mosi<sub>2</sub> target
publisher MDPI AG
series Materials
issn 1996-1944
publishDate 2021-04-01
description Coatings in a Zr-Mo-Si-B-N system were deposited by the magnetron sputtering of ZrB<sub>2</sub>-MoSi<sub>2</sub> targets in argon and nitrogen. The structure of the coatings was investigated using scanning electron microscopy, X-ray diffraction, energy-dispersive spectroscopy, and glow-discharge optical emission spectroscopy. Mechanical and tribological properties were measured using nanoindentation and pin-on-disc testing. Oxidation resistance and oxidation kinetics were estimated via annealing in air at 1000–1500 °C and precision weight measurements. We found that the coatings deposited in Ar demonstrate a superior combination of properties, including hardness of 36 GPa, elastic recovery of 84%, a friction coefficient of 0.6, and oxidation resistance at temperatures up to 1200 °C. High oxidation resistance is realized due to the formation of the protective (SiO<sub>2</sub> + ZrO<sub>2</sub>)/SiO<sub>2</sub> oxide layer, which inhibits the diffusion of oxygen into the coating.
topic magnetron sputtering
coating
ZrB<sub>2</sub>
MoSi<sub>2</sub>
Zr-Mo-Si-B-(N)
structure
url https://www.mdpi.com/1996-1944/14/8/1932
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