Surface Modification of Dielectric Substrates by Broad Beams of High-Energy Atoms of Inert Gases
We present a new method to generate a neutral beam for surface treatment of materials by fast atoms of inert gases. The new method allows for treatment at lower pressures enlarging the scope for glow discharge applications. To generate the monoenergetic neutral beam, a grid composed of parallel plat...
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MDPI AG
2020-08-01
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| Series: | Technologies |
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| Online Access: | https://www.mdpi.com/2227-7080/8/3/43 |
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doaj-b0979442c80e4182bdf9292bf9e625452020-11-25T02:49:33ZengMDPI AGTechnologies2227-70802020-08-018434310.3390/technologies8030043Surface Modification of Dielectric Substrates by Broad Beams of High-Energy Atoms of Inert GasesAlexander Metel0Sergey Grigoriev1Marina Volosova2Yury Melnik3Enver Mustafaev4Department of High-efficiency Processing technology, Moscow State University of Technology, Vadkovsky per. 3A, 127055 Moscow, RussiaDepartment of High-efficiency Processing technology, Moscow State University of Technology, Vadkovsky per. 3A, 127055 Moscow, RussiaDepartment of High-efficiency Processing technology, Moscow State University of Technology, Vadkovsky per. 3A, 127055 Moscow, RussiaDepartment of High-efficiency Processing technology, Moscow State University of Technology, Vadkovsky per. 3A, 127055 Moscow, RussiaDepartment of High-efficiency Processing technology, Moscow State University of Technology, Vadkovsky per. 3A, 127055 Moscow, RussiaWe present a new method to generate a neutral beam for surface treatment of materials by fast atoms of inert gases. The new method allows for treatment at lower pressures enlarging the scope for glow discharge applications. To generate the monoenergetic neutral beam, a grid composed of parallel plates is placed inside a vacuum chamber, a glow discharge plasma was generated, and a beam was formed by pulsing the grid to 30 kV to extract ions from the glow discharge. The ions were then neutralized by small-angle scattering at the surfaces of the grid. By applying the high voltage for 50 µs with a repetition frequency of 50 Hz, heating of the target could be limited to 100 °C (instead of 700 °C when running continuously). We present results showing the uniformity of the created beam and its energy distribution using Doppler-shift measurement. Finally, we show friction measurement of treated alumina pieces as a working example of an application of this technology.https://www.mdpi.com/2227-7080/8/3/43glow dischargeelectron confinementplasma homogeneitycharge-transfer collisionsaccelerated ionsfast atoms |
| collection |
DOAJ |
| language |
English |
| format |
Article |
| sources |
DOAJ |
| author |
Alexander Metel Sergey Grigoriev Marina Volosova Yury Melnik Enver Mustafaev |
| spellingShingle |
Alexander Metel Sergey Grigoriev Marina Volosova Yury Melnik Enver Mustafaev Surface Modification of Dielectric Substrates by Broad Beams of High-Energy Atoms of Inert Gases Technologies glow discharge electron confinement plasma homogeneity charge-transfer collisions accelerated ions fast atoms |
| author_facet |
Alexander Metel Sergey Grigoriev Marina Volosova Yury Melnik Enver Mustafaev |
| author_sort |
Alexander Metel |
| title |
Surface Modification of Dielectric Substrates by Broad Beams of High-Energy Atoms of Inert Gases |
| title_short |
Surface Modification of Dielectric Substrates by Broad Beams of High-Energy Atoms of Inert Gases |
| title_full |
Surface Modification of Dielectric Substrates by Broad Beams of High-Energy Atoms of Inert Gases |
| title_fullStr |
Surface Modification of Dielectric Substrates by Broad Beams of High-Energy Atoms of Inert Gases |
| title_full_unstemmed |
Surface Modification of Dielectric Substrates by Broad Beams of High-Energy Atoms of Inert Gases |
| title_sort |
surface modification of dielectric substrates by broad beams of high-energy atoms of inert gases |
| publisher |
MDPI AG |
| series |
Technologies |
| issn |
2227-7080 |
| publishDate |
2020-08-01 |
| description |
We present a new method to generate a neutral beam for surface treatment of materials by fast atoms of inert gases. The new method allows for treatment at lower pressures enlarging the scope for glow discharge applications. To generate the monoenergetic neutral beam, a grid composed of parallel plates is placed inside a vacuum chamber, a glow discharge plasma was generated, and a beam was formed by pulsing the grid to 30 kV to extract ions from the glow discharge. The ions were then neutralized by small-angle scattering at the surfaces of the grid. By applying the high voltage for 50 µs with a repetition frequency of 50 Hz, heating of the target could be limited to 100 °C (instead of 700 °C when running continuously). We present results showing the uniformity of the created beam and its energy distribution using Doppler-shift measurement. Finally, we show friction measurement of treated alumina pieces as a working example of an application of this technology. |
| topic |
glow discharge electron confinement plasma homogeneity charge-transfer collisions accelerated ions fast atoms |
| url |
https://www.mdpi.com/2227-7080/8/3/43 |
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AT alexandermetel surfacemodificationofdielectricsubstratesbybroadbeamsofhighenergyatomsofinertgases AT sergeygrigoriev surfacemodificationofdielectricsubstratesbybroadbeamsofhighenergyatomsofinertgases AT marinavolosova surfacemodificationofdielectricsubstratesbybroadbeamsofhighenergyatomsofinertgases AT yurymelnik surfacemodificationofdielectricsubstratesbybroadbeamsofhighenergyatomsofinertgases AT envermustafaev surfacemodificationofdielectricsubstratesbybroadbeamsofhighenergyatomsofinertgases |
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