Fabrication of piezodriven, free-standing, all-oxide heteroepitaxial cantilevers on silicon

Fabrication of piezodriven, free-standing, all-oxide heteroepitaxial cantilevers on silicon

We report on the fabrication and mechanical properties of all-oxide, free-standing, heteroepitaxial, piezoelectric, microelectromechanical systems (MEMS) on silicon, using PbZr0.52Ti0.48O3 as the key functional material. The fabrication was enabled by the development of an epitaxial lift-off strateg...

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Bibliographic Details
Main Authors: N. Banerjee, E. P. Houwman, G. Koster, G. Rijnders
Format: Article
Language:English
Published: AIP Publishing LLC 2014-09-01
Series:APL Materials
Online Access:http://dx.doi.org/10.1063/1.4893355

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