Resist-Free Directed Self-Assembly Chemo-Epitaxy Approach for Line/Space Patterning
This work reports a novel, simple, and resist-free chemo-epitaxy process permitting the directed self-assembly (DSA) of lamella polystyrene-block-polymethylmethacrylate (PS-<i>b</i>-PMMA) block copolymers (BCPs) on a 300 mm wafer. 193i lithography is used to manufacture topographical gui...
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2020-12-01
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| Series: | Nanomaterials |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2079-4991/10/12/2443 |