Modeling, simulation and experimental research for MEMS cantilevers of complex geometry

Modeling, simulation and experimental research for MEMS cantilevers of complex geometry

The fundamental resonant frequencies for MEMS cantilevers of complex geometry (paddle-shaped rectangular microbeam, homogeneous on a part of length and nonhomogeneous, layered structure to the wider part of the beam) are calculated. A method of analytical calculation using the Mohr-Maxwell theory is...

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Bibliographic Details
Main Authors:	Sandu Adriana, Bogatu Lucian, Ionascu Georgeta, Manea Elena, Gheorghe Viorel
Format:	Article
Language:	English
Published:	EDP Sciences 2019-01-01
Series:	MATEC Web of Conferences
Online Access:	https://www.matec-conferences.org/articles/matecconf/pdf/2019/39/matecconf_mse2019_08002.pdf

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