Modeling, simulation and experimental research for MEMS cantilevers of complex geometry

Modeling, simulation and experimental research for MEMS cantilevers of complex geometry

The fundamental resonant frequencies for MEMS cantilevers of complex geometry (paddle-shaped rectangular microbeam, homogeneous on a part of length and nonhomogeneous, layered structure to the wider part of the beam) are calculated. A method of analytical calculation using the Mohr-Maxwell theory is...

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Main Authors: Sandu Adriana, Bogatu Lucian, Ionascu Georgeta, Manea Elena, Gheorghe Viorel
Format: Article
Language:English
Published: EDP Sciences 2019-01-01
Series:MATEC Web of Conferences
Online Access:https://www.matec-conferences.org/articles/matecconf/pdf/2019/39/matecconf_mse2019_08002.pdf
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spelling doaj-afa02da5ad4d4bc686092fdd3515558d2021-02-02T02:27:14ZengEDP SciencesMATEC Web of Conferences2261-236X2019-01-012900800210.1051/matecconf/201929008002matecconf_mse2019_08002Modeling, simulation and experimental research for MEMS cantilevers of complex geometrySandu Adriana0Bogatu Lucian1Ionascu Georgeta2Manea Elena3Gheorghe Viorel4POLITEHNICA University of Bucharest, Dpt. of Strength of MaterialsPOLITEHNICA University of Bucharest, Dpt. of Mechatronics and Precision MechanicsPOLITEHNICA University of Bucharest, Dpt. of Mechatronics and Precision MechanicsNational Institute for Research and Development in MicrotechnologiesPOLITEHNICA University of Bucharest, Dpt. of Mechatronics and Precision MechanicsThe fundamental resonant frequencies for MEMS cantilevers of complex geometry (paddle-shaped rectangular microbeam, homogeneous on a part of length and nonhomogeneous, layered structure to the wider part of the beam) are calculated. A method of analytical calculation using the Mohr-Maxwell theory is proposed for homogeneous microcantilevers, which is then adapted for non-homogeneous structures. The analytical model has been validated by numerical simulation using finite element method (FEM). The experimental validation has been made using laser-Doppler vibrometry (LDV) by scanning with the Polytec MSA-500 system.https://www.matec-conferences.org/articles/matecconf/pdf/2019/39/matecconf_mse2019_08002.pdf
collection DOAJ
language English
format Article
sources DOAJ
author Sandu Adriana
Bogatu Lucian
Ionascu Georgeta
Manea Elena
Gheorghe Viorel
spellingShingle Sandu Adriana
Bogatu Lucian
Ionascu Georgeta
Manea Elena
Gheorghe Viorel
Modeling, simulation and experimental research for MEMS cantilevers of complex geometry
MATEC Web of Conferences
author_facet Sandu Adriana
Bogatu Lucian
Ionascu Georgeta
Manea Elena
Gheorghe Viorel
author_sort Sandu Adriana
title Modeling, simulation and experimental research for MEMS cantilevers of complex geometry
title_short Modeling, simulation and experimental research for MEMS cantilevers of complex geometry
title_full Modeling, simulation and experimental research for MEMS cantilevers of complex geometry
title_fullStr Modeling, simulation and experimental research for MEMS cantilevers of complex geometry
title_full_unstemmed Modeling, simulation and experimental research for MEMS cantilevers of complex geometry
title_sort modeling, simulation and experimental research for mems cantilevers of complex geometry
publisher EDP Sciences
series MATEC Web of Conferences
issn 2261-236X
publishDate 2019-01-01
description The fundamental resonant frequencies for MEMS cantilevers of complex geometry (paddle-shaped rectangular microbeam, homogeneous on a part of length and nonhomogeneous, layered structure to the wider part of the beam) are calculated. A method of analytical calculation using the Mohr-Maxwell theory is proposed for homogeneous microcantilevers, which is then adapted for non-homogeneous structures. The analytical model has been validated by numerical simulation using finite element method (FEM). The experimental validation has been made using laser-Doppler vibrometry (LDV) by scanning with the Polytec MSA-500 system.
url https://www.matec-conferences.org/articles/matecconf/pdf/2019/39/matecconf_mse2019_08002.pdf
work_keys_str_mv AT sanduadriana modelingsimulationandexperimentalresearchformemscantileversofcomplexgeometry
AT bogatulucian modelingsimulationandexperimentalresearchformemscantileversofcomplexgeometry
AT ionascugeorgeta modelingsimulationandexperimentalresearchformemscantileversofcomplexgeometry
AT maneaelena modelingsimulationandexperimentalresearchformemscantileversofcomplexgeometry
AT gheorgheviorel modelingsimulationandexperimentalresearchformemscantileversofcomplexgeometry
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