Modeling, simulation and experimental research for MEMS cantilevers of complex geometry
The fundamental resonant frequencies for MEMS cantilevers of complex geometry (paddle-shaped rectangular microbeam, homogeneous on a part of length and nonhomogeneous, layered structure to the wider part of the beam) are calculated. A method of analytical calculation using the Mohr-Maxwell theory is...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2019-01-01
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| Series: | MATEC Web of Conferences |
| Online Access: | https://www.matec-conferences.org/articles/matecconf/pdf/2019/39/matecconf_mse2019_08002.pdf |
| Summary: | The fundamental resonant frequencies for MEMS cantilevers of complex geometry (paddle-shaped rectangular microbeam, homogeneous on a part of length and nonhomogeneous, layered structure to the wider part of the beam) are calculated. A method of analytical calculation using the Mohr-Maxwell theory is proposed for homogeneous microcantilevers, which is then adapted for non-homogeneous structures. The analytical model has been validated by numerical simulation using finite element method (FEM). The experimental validation has been made using laser-Doppler vibrometry (LDV) by scanning with the Polytec MSA-500 system. |
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| ISSN: | 2261-236X |