Enhanced Visible Transmittance of Thermochromic VO2 Thin Films by SiO2 Passivation Layer and Their Optical Characterization
This paper presents the preparation of high-quality vanadium dioxide (VO2) thermochromic thin films with enhanced visible transmittance (Tvis) via radio frequency (RF) sputtering and plasma enhanced chemical vapor deposition (PECVD). VO2 thin films with high Tvis and excellent optical switching effi...
Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2016-07-01
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Series: | Materials |
Subjects: | |
Online Access: | http://www.mdpi.com/1996-1944/9/7/556 |