Optical Interference and Self-Scattering Effect On Laser Ablation of Thin Silicon Films

Optical Interference and Self-Scattering Effect On Laser Ablation of Thin Silicon Films

We report measurement of the ablation depth and self-reflectivity from thin silicon films illuminated by a single tightly focused femtosecond laser pulse. We show the dependence of ablation depth on incident laser pulse fluence can be modeled with a transfer-matrix method, taking into account transi...

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Main Authors: Zhang Hao, van Oosten D., Krol D. M., Dijkhuis J. I.
Format: Article
Language:English
Published: EDP Sciences 2013-11-01
Series:MATEC Web of Conferences
Online Access:http://dx.doi.org/10.1051/matecconf/20130804011
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spelling doaj-ae463877c73046ecb2b215c47b86d50e2021-02-02T03:32:25ZengEDP SciencesMATEC Web of Conferences2261-236X2013-11-0180401110.1051/matecconf/20130804011Optical Interference and Self-Scattering Effect On Laser Ablation of Thin Silicon FilmsZhang Haovan Oosten D.Krol D. M.Dijkhuis J. I.We report measurement of the ablation depth and self-reflectivity from thin silicon films illuminated by a single tightly focused femtosecond laser pulse. We show the dependence of ablation depth on incident laser pulse fluence can be modeled with a transfer-matrix method, taking into account transient reflectivity and light propagation in a stratified medium. We find optical interference effects in laser ablation of thin films are of crucial importance. Furthermore, We present the evidence of self-scattering effects due to the buildup of a three dimensional submicron sized plasma in the focal region. http://dx.doi.org/10.1051/matecconf/20130804011
collection DOAJ
language English
format Article
sources DOAJ
author Zhang Hao
van Oosten D.
Krol D. M.
Dijkhuis J. I.
spellingShingle Zhang Hao
van Oosten D.
Krol D. M.
Dijkhuis J. I.
Optical Interference and Self-Scattering Effect On Laser Ablation of Thin Silicon Films
MATEC Web of Conferences
author_facet Zhang Hao
van Oosten D.
Krol D. M.
Dijkhuis J. I.
author_sort Zhang Hao
title Optical Interference and Self-Scattering Effect On Laser Ablation of Thin Silicon Films
title_short Optical Interference and Self-Scattering Effect On Laser Ablation of Thin Silicon Films
title_full Optical Interference and Self-Scattering Effect On Laser Ablation of Thin Silicon Films
title_fullStr Optical Interference and Self-Scattering Effect On Laser Ablation of Thin Silicon Films
title_full_unstemmed Optical Interference and Self-Scattering Effect On Laser Ablation of Thin Silicon Films
title_sort optical interference and self-scattering effect on laser ablation of thin silicon films
publisher EDP Sciences
series MATEC Web of Conferences
issn 2261-236X
publishDate 2013-11-01
description We report measurement of the ablation depth and self-reflectivity from thin silicon films illuminated by a single tightly focused femtosecond laser pulse. We show the dependence of ablation depth on incident laser pulse fluence can be modeled with a transfer-matrix method, taking into account transient reflectivity and light propagation in a stratified medium. We find optical interference effects in laser ablation of thin films are of crucial importance. Furthermore, We present the evidence of self-scattering effects due to the buildup of a three dimensional submicron sized plasma in the focal region.
url http://dx.doi.org/10.1051/matecconf/20130804011
work_keys_str_mv AT zhanghao opticalinterferenceandselfscatteringeffectonlaserablationofthinsiliconfilms
AT vanoostend opticalinterferenceandselfscatteringeffectonlaserablationofthinsiliconfilms
AT kroldm opticalinterferenceandselfscatteringeffectonlaserablationofthinsiliconfilms
AT dijkhuisji opticalinterferenceandselfscatteringeffectonlaserablationofthinsiliconfilms
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