Humidity influence on the adhesion of SU-8 polymer from MEMS applications
In this paper, the adhesion behaviors of SU-8 polymer thin film from MEMS application were investigated as a function of relative humidity. The adhesion test between the AFM tip and SU-8 polymer have been extensively studied using the atomic force microscope (AFM), for a relative humidity (RH) varyi...
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2017-01-01
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Series: | MATEC Web of Conferences |
Online Access: | https://doi.org/10.1051/matecconf/201713708002 |
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doaj-ae28b9b2aeda49cd8e7aafabe54dfd3a2021-02-02T02:24:58ZengEDP SciencesMATEC Web of Conferences2261-236X2017-01-011370800210.1051/matecconf/201713708002matecconf_mtem2017_08002Humidity influence on the adhesion of SU-8 polymer from MEMS applicationsBirleanu CorinaPustan MariusVoicu RodicaSerdean FlorinaMerie VioletaIn this paper, the adhesion behaviors of SU-8 polymer thin film from MEMS application were investigated as a function of relative humidity. The adhesion test between the AFM tip and SU-8 polymer have been extensively studied using the atomic force microscope (AFM), for a relative humidity (RH) varying between 20 and 90%. The samples for tests are SU-8 polymers hard baked at different temperatures. The hard bake temperature changes the tribo-mechanical properties of polymers. The paper reports the measurements and the modeling of adhesion forces versus humidity in controlled ranges between 20 to 90%RH. To investigate the effect of relative humidity on adhesion for SU-8 polymer hard baked we used an analytical method which encompasses the effect of capillarity as well as the solid-to-solid interaction. While the capillary force expression is considered to be the sum of the superficial tension and the Laplace force for the solid-solid interaction is expressed by the Derjagin, Muller and Toropov (DMT) model of solids adhesion. The analytical results obtained are in accordance with those obtained experimentally.https://doi.org/10.1051/matecconf/201713708002 |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
Birleanu Corina Pustan Marius Voicu Rodica Serdean Florina Merie Violeta |
spellingShingle |
Birleanu Corina Pustan Marius Voicu Rodica Serdean Florina Merie Violeta Humidity influence on the adhesion of SU-8 polymer from MEMS applications MATEC Web of Conferences |
author_facet |
Birleanu Corina Pustan Marius Voicu Rodica Serdean Florina Merie Violeta |
author_sort |
Birleanu Corina |
title |
Humidity influence on the adhesion of SU-8 polymer from MEMS applications |
title_short |
Humidity influence on the adhesion of SU-8 polymer from MEMS applications |
title_full |
Humidity influence on the adhesion of SU-8 polymer from MEMS applications |
title_fullStr |
Humidity influence on the adhesion of SU-8 polymer from MEMS applications |
title_full_unstemmed |
Humidity influence on the adhesion of SU-8 polymer from MEMS applications |
title_sort |
humidity influence on the adhesion of su-8 polymer from mems applications |
publisher |
EDP Sciences |
series |
MATEC Web of Conferences |
issn |
2261-236X |
publishDate |
2017-01-01 |
description |
In this paper, the adhesion behaviors of SU-8 polymer thin film from MEMS application were investigated as a function of relative humidity. The adhesion test between the AFM tip and SU-8 polymer have been extensively studied using the atomic force microscope (AFM), for a relative humidity (RH) varying between 20 and 90%. The samples for tests are SU-8 polymers hard baked at different temperatures. The hard bake temperature changes the tribo-mechanical properties of polymers. The paper reports the measurements and the modeling of adhesion forces versus humidity in controlled ranges between 20 to 90%RH. To investigate the effect of relative humidity on adhesion for SU-8 polymer hard baked we used an analytical method which encompasses the effect of capillarity as well as the solid-to-solid interaction. While the capillary force expression is considered to be the sum of the superficial tension and the Laplace force for the solid-solid interaction is expressed by the Derjagin, Muller and Toropov (DMT) model of solids adhesion. The analytical results obtained are in accordance with those obtained experimentally. |
url |
https://doi.org/10.1051/matecconf/201713708002 |
work_keys_str_mv |
AT birleanucorina humidityinfluenceontheadhesionofsu8polymerfrommemsapplications AT pustanmarius humidityinfluenceontheadhesionofsu8polymerfrommemsapplications AT voicurodica humidityinfluenceontheadhesionofsu8polymerfrommemsapplications AT serdeanflorina humidityinfluenceontheadhesionofsu8polymerfrommemsapplications AT merievioleta humidityinfluenceontheadhesionofsu8polymerfrommemsapplications |
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