Nanofabrication of SOI-Based Photonic Waveguide Resonators for Gravimetric Molecule Detection

Nanofabrication of SOI-Based Photonic Waveguide Resonators for Gravimetric Molecule Detection

A silicon photonic microresonator comprising two curved vertical grating couplers and a single suspended Si nanowaveguide (NWG) is developed to investigate the giant enhanced Brillouin scattering in subwavelength NWGs caused by photon-phonon interaction. Finite element modelling based on COMSOL Mult...

Full description

Bibliographic Details
Main Authors:	Tony Granz, Julia Sophie Böke, Gerry Hamdana, Michael Martens, Arijit Misra, Stefan Preußler, Meinhard Schilling, Erwin Peiner, Thomas Schneider, Andreas Waag
Format:	Article
Language:	English
Published:	MDPI AG 2019-02-01
Series:	Proceedings
Subjects:	nanowaveguide silicon photonics optical communication integrated optics silicon technology
Online Access:	https://www.mdpi.com/2504-3900/2/13/1055

Similar Items

Efficient Chemical Sensing by Coupled Slot SOI Waveguides
by: Mario N. Armenise, et al.
Published: (2009-02-01)

Fabrication of Polyimide Optical Waveguide on Silicon Dioxide Layer Stacked Silicon Substrate
by: Dadin Mahmudin, et al.
Published: (2017-12-01)

Integrated Lab-on-a-Chip Optical Biosensor Using Ultrathin Silicon Waveguide SOI MMI Device
by: Mohamed Y. Elsayed, et al.
Published: (2020-09-01)

Polarization Beam Splitter Based on Si<sub>3</sub>N<sub>4</sub>/SiO<sub>2</sub> Horizontal Slot Waveguides for On-Chip High-Power Applications
by: Yuxi Fang, et al.
Published: (2020-05-01)

Silicon waveguide devices for shaping and retiming of optical signals.
Published: (2013)

Polarization Rotation in Silicon Waveguides: Analytical Modeling and Applications
by: Ivan D. Rukhlenko, et al.
Published: (2010-01-01)

Waveguiding Light into Silicon Oxycarbide
by: Faisal Ahmed Memon, et al.
Published: (2017-05-01)

Enhanced Modal Coupling Loss in a Two-Mode SOI Waveguide of Broken Parity-Time Symmetry
by: Ang Liu, et al.
Published: (2018-01-01)

High-Order Mode Rotator on the SOI Integrated Platform
by: Jiamin Wang, et al.
Published: (2016-01-01)

Long-Duration Optical Pulse Shaping and Complex Coding on SOI
by: H. P. Bazargani, et al.
Published: (2016-01-01)

Porous silicon thin films : a study of their optical properties and growth mechanism
by: Riley, David Washington
Published: (2008)

Compact Silicon Slot Waveguide Intersection Based on Mode Transformation and Multimode Interference
by: Kyoung-Soo Kim, et al.
Published: (2017-01-01)

Optical properties and applications of silicon waveguides.
Published: (2002)

Polymer-Waveguide-Based Optical Circuit With Two Vertical-Transition Output Ports Realized on Silicon Substrate for Optical Interconnects
by: Mount-Learn Wu, et al.
Published: (2013-01-01)

Design of a 90 GHz SOI Fin Electro-Optic Modulator for High-Speed Applications
by: Hany Mahrous, et al.
Published: (2019-11-01)

Silicon Hybrid Plasmonic Waveguides and Passive Devices
by: Wu, Marcelo
Published: (2011)

Low Loss Electro-Optic Polymer Based Fast Adaptive Phase Shifters Realized in Silicon Nitride and Oxynitride Waveguide Technology
by: Lars Baudzus, et al.
Published: (2016-08-01)

Dual-Mode GVD Tailoring in a Convex Waveguide
by: Weicheng Chen, et al.
Published: (2020-01-01)

Bi-Directional Benes With Large Port-Counts and Low Waveguide Crossings for Optical Network-on-Chip
by: Li Zhao, et al.
Published: (2021-01-01)

SOI Based Integrated-Optic Microring Resonators for Biomedical Sensing Applications
by: Mangal, Nivesh
Published: (2018)

Ultracompact Optical Comparator for 4-bit QPSK-Modulated Signal Based on Silicon Photonic Waveguide
by: Yohei Aikawa
Published: (2019-01-01)

Fabrication of a vertically stacked grating coupler for optical waveguides in silicon-on-insulator
by: Bhatnagar, Sameer.
Published: (2008)

Investigation of Side Wall Roughness Effect on Optical Losses in a Multimode Si<sub>3</sub>N<sub>4</sub> Waveguide Formed on a Quartz Substrate
by: Anastasia Yakuhina, et al.
Published: (2020-11-01)

Compact Thermo-Optic Switch Based on Tapered W1 Photonic Crystal Waveguide
by: Qiang Zhao, et al.
Published: (2013-01-01)

Volumetric Imaging and Characterization of Focusing Waveguide Grating Couplers
by: Aaron Michael Katzenmeyer, et al.
Published: (2017-01-01)

Cascaded Integration of Optical Waveguides With Third-Order Nonlinearity With Lithium Niobate Waveguides on Silicon Substrates
by: Amirmahdi Honardoost, et al.
Published: (2018-01-01)

Small sensitivity to temperature variations of Si-photonic Mach-Zehnder interferometer using Si and SiN waveguides
by: Tatsurou eHiraki, et al.
Published: (2015-03-01)

Invloed van substraattemperatuur en uitgloeiing op die elektriese en optiese eienskappe van amorfe silikon
by: Prinsloo, John James Richard
Published: (2014)

Optical Gratings Coated with Thin Si3N4 Layer for Efficient Immunosensing by Optical Waveguide Lightmode Spectroscopy
by: Lorena Diéguez, et al.
Published: (2012-04-01)

25-Gb/s 1310-nm Optical Receiver Based on a Sub-5-V Waveguide-Coupled Germanium Avalanche Photodiode
by: H. T. Chen, et al.
Published: (2015-01-01)

Solid-Electrolyte-Gated Graphene-Covered Metal-Insulator-Silicon-Insulator-Metal Waveguide With a Remarkably Large Modulation Depth
by: Yonghan Kim, et al.
Published: (2019-01-01)

Optiese eienskappe van dun lagies amorfe silikon op kristallyne silikon
Published: (2015)

Die optiese eienskappe van opgedampte silikon dunlagies
by: Venter, Jacobus Ignatius
Published: (2014)

Investigation of SOI Raman Lasers for Mid-Infrared Gas Sensing
by: Francesco De Leonardis, et al.
Published: (2009-09-01)

Modeling and Optimization of Vortex Modes Propagation in Rectangular Dielectric Waveguides
by: Vladimir S. Lyubopytov, et al.
Published: (2020-01-01)

Experimental Demonstration of Thermally Tunable Fano and EIT Resonances in Coupled Resonant System on SOI Platform
by: Zecen Zhang, et al.
Published: (2018-01-01)

Low-Temperature and Low-Pressure Silicon Nitride Deposition by ECR-PECVD for Optical Waveguides
by: Dawson B. Bonneville, et al.
Published: (2021-02-01)

A Tellurium Oxide Microcavity Resonator Sensor Integrated On-Chip with a Silicon Waveguide
by: Henry C. Frankis, et al.
Published: (2018-11-01)

Compact Low-Loss Electroabsorption Modulator Using a Graphene-Inserted Metal-Slot-Added Waveguide
by: Jihoon Seo, et al.
Published: (2020-01-01)

FDTD investigation on compact and wideband optical integration between Si3N4 and Ge-based waveguide devices via amorphous Si and GeSi lateral tapers
by: Worawat Traiwattanapong, et al.
Published: (2020-09-01)

Cannot write session to /tmp/vufind_sessions/sess_p44n867itkm6f55d2l0uq614lr