Optimization of technology of Si-затравок for the production of поликристаллического silicon

Optimization of technology of Si-затравок for the production of поликристаллического silicon

In the articles described results of researches of technology of growing of затравок are from silicon (Si-growth) for the process of receipt of poly-silicon of electronic quality. Conformities to the law and thermal terms are studied which provide crystallizations of silicon of, high-quality descrip...

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Main Author: Юрий Васильевич Реков
Format: Article
Language:English
Published: PC Technology Center 2012-09-01
Series:Tehnologìčnij Audit ta Rezervi Virobnictva
Subjects:
Silicon, admixtures, float zone melting, hydrogen renewal of silicon chloride
Online Access:http://journals.uran.ua/tarp/article/view/4727
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spelling doaj-ac8246df7adb40f9b2d380b5908b92062020-11-25T01:54:26ZengPC Technology CenterTehnologìčnij Audit ta Rezervi Virobnictva2226-37802312-83722012-09-0131(5)151610.15587/2312-8372.2012.47274727Optimization of technology of Si-затравок for the production of поликристаллического siliconЮрий Васильевич Реков0Zaporozhe state engineering academy PJC «Factory of semiconductors», ZaporozheIn the articles described results of researches of technology of growing of затравок are from silicon (Si-growth) for the process of receipt of poly-silicon of electronic quality. Conformities to the law and thermal terms are studied which provide crystallizations of silicon of, high-quality descriptions of process of hydrogen renewal of chlorides of silicon. The method of implementation of express control of poly-silicon is offered on determination of maintenance of admixture of the coniferous foresthttp://journals.uran.ua/tarp/article/view/4727Silicon, admixtures, float zone melting, hydrogen renewal of silicon chloride
collection DOAJ
language English
format Article
sources DOAJ
author Юрий Васильевич Реков
spellingShingle Юрий Васильевич Реков
Optimization of technology of Si-затравок for the production of поликристаллического silicon
Tehnologìčnij Audit ta Rezervi Virobnictva
Silicon, admixtures, float zone melting, hydrogen renewal of silicon chloride
author_facet Юрий Васильевич Реков
author_sort Юрий Васильевич Реков
title Optimization of technology of Si-затравок for the production of поликристаллического silicon
title_short Optimization of technology of Si-затравок for the production of поликристаллического silicon
title_full Optimization of technology of Si-затравок for the production of поликристаллического silicon
title_fullStr Optimization of technology of Si-затравок for the production of поликристаллического silicon
title_full_unstemmed Optimization of technology of Si-затравок for the production of поликристаллического silicon
title_sort optimization of technology of si-затравок for the production of поликристаллического silicon
publisher PC Technology Center
series Tehnologìčnij Audit ta Rezervi Virobnictva
issn 2226-3780
2312-8372
publishDate 2012-09-01
description In the articles described results of researches of technology of growing of затравок are from silicon (Si-growth) for the process of receipt of poly-silicon of electronic quality. Conformities to the law and thermal terms are studied which provide crystallizations of silicon of, high-quality descriptions of process of hydrogen renewal of chlorides of silicon. The method of implementation of express control of poly-silicon is offered on determination of maintenance of admixture of the coniferous forest
topic Silicon, admixtures, float zone melting, hydrogen renewal of silicon chloride
url http://journals.uran.ua/tarp/article/view/4727
work_keys_str_mv AT ûrijvasilʹevičrekov optimizationoftechnologyofsizatravokfortheproductionofpolikristalličeskogosilicon
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