Optimization of technology of Si-затравок for the production of поликристаллического silicon
In the articles described results of researches of technology of growing of затравок are from silicon (Si-growth) for the process of receipt of poly-silicon of electronic quality. Conformities to the law and thermal terms are studied which provide crystallizations of silicon of, high-quality descrip...
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| Format: | Article |
| Language: | English |
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PC Technology Center
2012-09-01
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| Series: | Tehnologìčnij Audit ta Rezervi Virobnictva |
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| Online Access: | http://journals.uran.ua/tarp/article/view/4727 |
| Summary: | In the articles described results of researches of technology of growing of затравок are from silicon (Si-growth) for the process of receipt of poly-silicon of electronic quality. Conformities to the law and thermal terms are studied which provide crystallizations of silicon of, high-quality descriptions of process of hydrogen renewal of chlorides of silicon. The method of implementation of express control of poly-silicon is offered on determination of maintenance of admixture of the coniferous forest |
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| ISSN: | 2226-3780 2312-8372 |