Visualization of femtosecond laser-induced stress anisotropy in amorphous and crystalline materials

In recent years, micro manufacturing with femtosecond lasers has received considerable attention as an efficient technique for producing three-dimensional devices, combining multiple functionalities in a single monolithic substrate. In this manufacturing process, stress-anisotropy resulting from non...

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Bibliographic Details
Main Authors: McMillen Ben, Chen Feng, Bellouard Yves
Format: Article
Language:English
Published: EDP Sciences 2015-01-01
Series:MATEC Web of Conferences
Online Access:http://dx.doi.org/10.1051/matecconf/20153202004
Description
Summary:In recent years, micro manufacturing with femtosecond lasers has received considerable attention as an efficient technique for producing three-dimensional devices, combining multiple functionalities in a single monolithic substrate. In this manufacturing process, stress-anisotropy resulting from non-ablative laser exposure can have both positive and negative effects on the process out-come. In this work, we present a simple method for visualizing stress anisotropy, combining highly symmetric laser-written patterns with polarization microscopy, as a tool for identifying the various anisotropic contributions to the laser fabrication process.
ISSN:2261-236X