DERIVATIZATION OF PHOTOACTIVE STRUCTURES SI(N+)/SI(P)/SI(P+) THROUGH ION-BEAM CRYSTALLIZATION
The physical and mathematical mass-transfer model of the ion-beam crystallization method is developed. The derivatization of photoactive structures Si(n+)/Si(p)/Si(p+) on 100 mm substrates through ion-beam crystallization is considered. The optimum conditions for the process: residual pressure in th...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | Russian |
| Published: |
Don State Technical University
2013-09-01
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| Series: | Advanced Engineering Research |
| Subjects: | |
| Online Access: | https://www.vestnik-donstu.ru/jour/article/view/419 |