Laser processed semiconductors for integrated photonic devices -INVITED

We report results of laser processing of amorphous silicon and silicon-germanium semiconductor materials for the production of integrated photonic platforms. As the materials are deposited and processed at low temperatures, they are flexible, low cost, and suitable for multi-layer integration with o...

Full description

Bibliographic Details
Main Authors:	Peacock Anna C., MacFarquhar Stuart J., Franz Yohann, Runge Antoine F. J., Mailis Sakellaris, Oo Swe Z., Mittal Vinita, Chong Harold M. H., Aktas Ozan
Format:	Article
Language:	English
Published:	EDP Sciences 2020-01-01
Series:	EPJ Web of Conferences
Online Access:	https://www.epj-conferences.org/articles/epjconf/pdf/2020/14/epjconf_eosam2020_01001.pdf

id	doaj-a90f4e1911a9412dbb4bbf4a18fe166f
record_format	Article
spelling	doaj-a90f4e1911a9412dbb4bbf4a18fe166f2021-08-02T17:35:54ZengEDP SciencesEPJ Web of Conferences2100-014X2020-01-012380100110.1051/epjconf/202023801001epjconf_eosam2020_01001Laser processed semiconductors for integrated photonic devices -INVITEDPeacock Anna C.0MacFarquhar Stuart J.1Franz Yohann2Runge Antoine F. J.3Mailis Sakellaris4Oo Swe Z.Mittal Vinita5Chong Harold M. H.6Aktas Ozan7Optoelectronics Research Centre, University of SouthamptonOptoelectronics Research Centre, University of SouthamptonOptoelectronics Research Centre, University of SouthamptonOptoelectronics Research Centre, University of SouthamptonOptoelectronics Research Centre, University of SouthamptonSchool of Electronics and Computer Science, University of SouthamptonSchool of Electronics and Computer Science, University of SouthamptonOptoelectronics Research Centre, University of SouthamptonWe report results of laser processing of amorphous silicon and silicon-germanium semiconductor materials for the production of integrated photonic platforms. As the materials are deposited and processed at low temperatures, they are flexible, low cost, and suitable for multi-layer integration with other photonic or electronic layers. We demonstrate the formation of waveguides via crystallization of pre-patterned silicon components and functional microstructures through crystallization and compositional tuning of silicon-germanium alloy films. These results open a route for the fabrication of high density, multi-functional integrated optoelectronic chips.https://www.epj-conferences.org/articles/epjconf/pdf/2020/14/epjconf_eosam2020_01001.pdf
collection	DOAJ
language	English
format	Article
sources	DOAJ
author	Peacock Anna C. MacFarquhar Stuart J. Franz Yohann Runge Antoine F. J. Mailis Sakellaris Oo Swe Z. Mittal Vinita Chong Harold M. H. Aktas Ozan
spellingShingle	Peacock Anna C. MacFarquhar Stuart J. Franz Yohann Runge Antoine F. J. Mailis Sakellaris Oo Swe Z. Mittal Vinita Chong Harold M. H. Aktas Ozan Laser processed semiconductors for integrated photonic devices -INVITED EPJ Web of Conferences
author_facet	Peacock Anna C. MacFarquhar Stuart J. Franz Yohann Runge Antoine F. J. Mailis Sakellaris Oo Swe Z. Mittal Vinita Chong Harold M. H. Aktas Ozan
author_sort	Peacock Anna C.
title	Laser processed semiconductors for integrated photonic devices -INVITED
title_short	Laser processed semiconductors for integrated photonic devices -INVITED
title_full	Laser processed semiconductors for integrated photonic devices -INVITED
title_fullStr	Laser processed semiconductors for integrated photonic devices -INVITED
title_full_unstemmed	Laser processed semiconductors for integrated photonic devices -INVITED
title_sort	laser processed semiconductors for integrated photonic devices -invited
publisher	EDP Sciences
series	EPJ Web of Conferences
issn	2100-014X
publishDate	2020-01-01
description	We report results of laser processing of amorphous silicon and silicon-germanium semiconductor materials for the production of integrated photonic platforms. As the materials are deposited and processed at low temperatures, they are flexible, low cost, and suitable for multi-layer integration with other photonic or electronic layers. We demonstrate the formation of waveguides via crystallization of pre-patterned silicon components and functional microstructures through crystallization and compositional tuning of silicon-germanium alloy films. These results open a route for the fabrication of high density, multi-functional integrated optoelectronic chips.
url	https://www.epj-conferences.org/articles/epjconf/pdf/2020/14/epjconf_eosam2020_01001.pdf
work_keys_str_mv	AT peacockannac laserprocessedsemiconductorsforintegratedphotonicdevicesinvited AT macfarquharstuartj laserprocessedsemiconductorsforintegratedphotonicdevicesinvited AT franzyohann laserprocessedsemiconductorsforintegratedphotonicdevicesinvited AT rungeantoinefj laserprocessedsemiconductorsforintegratedphotonicdevicesinvited AT mailissakellaris laserprocessedsemiconductorsforintegratedphotonicdevicesinvited AT ooswez laserprocessedsemiconductorsforintegratedphotonicdevicesinvited AT mittalvinita laserprocessedsemiconductorsforintegratedphotonicdevicesinvited AT chongharoldmh laserprocessedsemiconductorsforintegratedphotonicdevicesinvited AT aktasozan laserprocessedsemiconductorsforintegratedphotonicdevicesinvited
_version_	1721229040725000192

Laser processed semiconductors for integrated photonic devices -INVITED

Similar Items