Testing of Piezo-Actuated Glass Micro-Membranes by Optical Low-Coherence Reflectometry

Testing of Piezo-Actuated Glass Micro-Membranes by Optical Low-Coherence Reflectometry

In this work, we have applied optical low-coherence reflectometry (OLCR), implemented with infra-red light propagating in fiberoptic paths, to perform static and dynamic analyses on piezo-actuated glass micro-membranes. The actuator was fabricated by means of thin-film piezoelectric MEMS technology...

Full description

Bibliographic Details
Main Authors:	Sabina Merlo, Paolo Poma, Eleonora Crisà, Dino Faralli, Marco Soldo
Format:	Article
Language:	English
Published:	MDPI AG 2017-02-01
Series:	Sensors
Subjects:	optical low-coherence reflectometry optical measurements thin-film piezo-electric actuator non-destructive testing
Online Access:	http://www.mdpi.com/1424-8220/17/3/462

Similar Items

External Modulation Optical Coherent Domain Reflectometry with Long Measurement Range
by: Yinghong Xue, et al.
Published: (2021-08-01)

Characterization of Tunable Micro-Lenses with a Versatile Optical Measuring System
by: Sabina Merlo, et al.
Published: (2018-12-01)

[en] LOW COHERENCE OPTICAL REFLECTOMETRY
by: JOSE AUGUSTO PEREIRA DA SILVA
Published: (2006)

Graphical Optimization of Spectral Shift Reconstructions for Optical Backscatter Reflectometry
by: Daniel C. Sweeney, et al.
Published: (2021-09-01)

Low-Coherence Reflectometry for Refractive Index Measurements of Cells in Micro-Capillaries
by: Francesca Carpignano, et al.
Published: (2016-10-01)

Monitoring of Various Glucose Concentrations Based on Optical Spectroscopic Reflectometry
by: Hariyadi SOETEDJO
Published: (2011-04-01)

Non-contact reflectometric readout of disposable microfluidic devices by near infra-red low-coherence interferometry
by: Giulia Rigamonti, et al.
Published: (2016-11-01)

Measurement Range Enhancement of Rayleigh-Based Optical Frequency Domain Reflectometry With Bidirectional Determination
by: Youngwoong Kim, et al.
Published: (2017-01-01)

Ultrahigh Resolution Optical Reflectometry Based on Linear Optical Sampling Technique With Digital Dispersion Compensation
by: Shuai Wang, et al.
Published: (2017-01-01)

Sliding Mode Tracking Control With Perturbation Estimation for Hysteresis Nonlinearity of Piezo-Actuated Stages
by: Rui Xu, et al.
Published: (2018-01-01)

Application of Intensity-Based Coherent Optical Time Domain Reflectometry to Bridge Monitoring
by: Chruscicki, S., et al.
Published: (2022)

[en] STUDY OF FREQUENCY INSTABILITY AND THERMAL EFFECTS IN DISTRIBUTAL FEEDBACK LASERS WITH COHERENT REFLECTOMETRY
by: ADELA ALENCAR SAAVEDRA
Published: (2006)

[en] CHARACTERIZATION OF OPTICAL WAVEGUIDES WITH LOW COHERENCE REFLECTOMETRY
by: CARLOS HUMBERTO PROLA JUNIOR
Published: (2006)

Analyse de composants photoniques par réflectométrie à faible cohérence sensible à la phase
by: Palavicini Cham, Carlos Alberto
Published: (2004)

Combining Reflectometry, Ablation and Fluid Collection in a Microstructured Fiber
by: Sudirman, Azizahalhakim
Published: (2009)

Flexural Deflection Prediction of Piezo-Composite Unimorph Actuator Using Material Orthotropy and Nonlinearity of Piezoelectric Material Layer
by: Jae Hoon Lee, et al.
Published: (2020-04-01)

Interferometric distributed sensing system with phase optical time-domain reflectometry
by: Chen Wang, et al.
Published: (2016-11-01)

Improvements of Piezo-Actuated Stick–Slip Micro-Drives: Modeling and Driving Waveform
by: Xuan-Ha Nguyen, et al.
Published: (2018-02-01)

Duhem Model-Based Hysteresis Identification in Piezo-Actuated Nano-Stage using Modified Particle Swarm Optimization
by: Khubab Ahmed, et al.
Published: (2021-03-01)

Distributed Optical Fiber Vibration Sensor Based on Phase-Sensitive Optical Time Domain Reflectometry
by: Ren, Meiqi
Published: (2016)

Adaptive Deterministic Vibration Control of a Piezo-Actuated Active–Passive Isolation Structure
by: Feng Li, et al.
Published: (2021-04-01)

A Microwave Reflectometry Technique for Profiling the Dielectric-Conductivity Properties of the Hagia Sophia Globe
by: Christos Vazouras, et al.
Published: (2018-02-01)

Developement of Piezo-Hydraulic Actuation Systems Technology for use on a Helicopter Trailing Edge Flap
by: Herdic, Scott Lucas
Published: (2006)

Incoherent Optical Frequency-Domain Reflectometry Based on Homodyne Electro-Optic Downconversion for Fiber-Optic Sensor Interrogation
by: Juan Clement, et al.
Published: (2019-05-01)

Quantitative Modeling of Coupled Piezo-Elastodynamic Behavior of Piezoelectric Actuators Bonded to an Elastic Medium for Structural Health Monitoring: A Review
by: Guoliang Huang, et al.
Published: (2010-04-01)

The Development of Piezo-Driven Tools for Cellular Piercing
by: Changhai Ru, et al.
Published: (2016-10-01)

Etude des comportements statique et dynamique des composites à phases piézo-électrique et piézo-magnétique
by: Nguyen, Tien The
Published: (2016)

Distributed Optical Fiber Sensors Based on Optical Frequency Domain Reflectometry: A review
by: Zhenyang Ding, et al.
Published: (2018-04-01)

Demonstration of Large Curvature Radius Shape Sensing Using Optical Frequency Domain Reflectometry in Multi-Core Fibers
by: Zeen Chen, et al.
Published: (2021-01-01)

Stability and vibrations control of a stepped beam using piezoelectric actuation
by: Kuliński Krzysztof, et al.
Published: (2018-01-01)

Measurement of plasma current in Tokamaks using an optical fibre reflectometry technique
by: Wuilpart Marc, et al.
Published: (2018-01-01)

A Review of Novel Architectures of Servovalves Driven by Piezoelectric Actuators
by: Paolo Tamburrano, et al.
Published: (2021-08-01)

INSPECTION ROBOTS WITH PIEZO ACTUATORS: MODELING, SIMULATION AND PROTOTYPES
by: F. Becker, et al.
Published: (2015-04-01)

Dynamic Range Enhanced Optical Frequency Domain Reflectometry Using Dual-Loop Composite Optical Phase-Locking
by: Yinxia Meng, et al.
Published: (2021-01-01)

Neutron reflectometry for structural studies in thin films of polymer nanocomposites. modeling
by: М. L. Karpets, et al.
Published: (2018-12-01)

Synchronization Control Scheme for Hybrid Linear Actuator Based on One Common Position Sensor with Long Travel Range and Nanometer Resolution
by: Peng Yao, et al.
Published: (2014-09-01)

Low-Coherence Reflectometry and Speckle Polarimetry in the Monitoring of Human Skin Pathologic Changes
by: Elena M. Artemina, et al.
Published: (2018-03-01)

Feasibility study of using amplified piezo-stack actuators for the actuation of direct drive servovalves
by: Tamburrano Paolo, et al.
Published: (2020-01-01)

Recent Advances in Brillouin Optical Correlation-Domain Reflectometry
by: Yosuke Mizuno, et al.
Published: (2018-10-01)

Ultimate Spatial Resolution Realisation in Optical Frequency Domain Reflectometry with Equal Frequency Resampling
by: Zhen Guo, et al.
Published: (2021-07-01)

Cannot write session to /tmp/vufind_sessions/sess_j6ufs5ib4fneds48556jotvlkb