| Summary: | This paper presents the concept, design, and characterization of a new type of integrated device with a hybrid structure. The proposed device is hybridized with an electrothermal actuator and a bending sensor with temperature-compensating ability, which can serve as a self-sensing system. The sensor displays a parallel change in the electrical resistance upon the temperature alteration, resulting enables a cancellation of cross talk. The actuator exhibits a visible maximum strain of 1.2% at an electric power intensity of around 1.05 mW/mm3, and the bending sensor can display the curvature without the need for an external monitoring system such as a laser displacement meter. The traceability of the motion is represented well while power is supplied, but a slight delay occurs when the power is switched off, this being due to the difference in thermal conductivity between the composite of the actuator and the sensor. This proposed hybrid device realizes a simple self-sensing operation using a simple power supply and monitoring reading lines. It offers ease of fabrication and promising practical applications in remote sensing/operating devices.
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