Femtosecond laser direct writing of three-dimensional micro/nanofluidics in porous glass
In this contribution, we show that 3D micro-/nanofluidic components with arbitrary geometries and configurations can be directly formed inside glass by femtosecond laser direct writing. We further demonstrate that nanofluidic channels of a width of ~40 nm can be directly fabricated in glass with lin...
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| Format: | Article |
| Language: | English |
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EDP Sciences
2013-11-01
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| Series: | MATEC Web of Conferences |
| Online Access: | http://dx.doi.org/10.1051/matecconf/20130805002 |
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doaj-a72108ad818243b0a22aade78cbaa0e42021-02-02T07:13:46ZengEDP SciencesMATEC Web of Conferences2261-236X2013-11-0180500210.1051/matecconf/20130805002Femtosecond laser direct writing of three-dimensional micro/nanofluidics in porous glassYa ChengLiao YangSugioka KojiIn this contribution, we show that 3D micro-/nanofluidic components with arbitrary geometries and configurations can be directly formed inside glass by femtosecond laser direct writing. We further demonstrate that nanofluidic channels of a width of ~40 nm can be directly fabricated in glass with linearly polarized femtosecond laser pulses, enabled by intentionally producing embedded nanograting structures with laser intensities slightly above a threshold value. http://dx.doi.org/10.1051/matecconf/20130805002 |
| collection |
DOAJ |
| language |
English |
| format |
Article |
| sources |
DOAJ |
| author |
Ya Cheng Liao Yang Sugioka Koji |
| spellingShingle |
Ya Cheng Liao Yang Sugioka Koji Femtosecond laser direct writing of three-dimensional micro/nanofluidics in porous glass MATEC Web of Conferences |
| author_facet |
Ya Cheng Liao Yang Sugioka Koji |
| author_sort |
Ya Cheng |
| title |
Femtosecond laser direct writing of three-dimensional micro/nanofluidics in porous glass |
| title_short |
Femtosecond laser direct writing of three-dimensional micro/nanofluidics in porous glass |
| title_full |
Femtosecond laser direct writing of three-dimensional micro/nanofluidics in porous glass |
| title_fullStr |
Femtosecond laser direct writing of three-dimensional micro/nanofluidics in porous glass |
| title_full_unstemmed |
Femtosecond laser direct writing of three-dimensional micro/nanofluidics in porous glass |
| title_sort |
femtosecond laser direct writing of three-dimensional micro/nanofluidics in porous glass |
| publisher |
EDP Sciences |
| series |
MATEC Web of Conferences |
| issn |
2261-236X |
| publishDate |
2013-11-01 |
| description |
In this contribution, we show that 3D micro-/nanofluidic components with arbitrary geometries and configurations can be directly formed inside glass by femtosecond laser direct writing. We further demonstrate that nanofluidic channels of a width of ~40 nm can be directly fabricated in glass with linearly polarized femtosecond laser pulses, enabled by intentionally producing embedded nanograting structures with laser intensities slightly above a threshold value. |
| url |
http://dx.doi.org/10.1051/matecconf/20130805002 |
| work_keys_str_mv |
AT yacheng femtosecondlaserdirectwritingofthreedimensionalmicronanofluidicsinporousglass AT liaoyang femtosecondlaserdirectwritingofthreedimensionalmicronanofluidicsinporousglass AT sugiokakoji femtosecondlaserdirectwritingofthreedimensionalmicronanofluidicsinporousglass |
| _version_ |
1724299787545608192 |