Research on High-Resolution Miniaturized MEMS Accelerometer Interface ASIC

Research on High-Resolution Miniaturized MEMS Accelerometer Interface ASIC

High-precision microelectromechanical system (MEMS) accelerometers have wide application in the military and civil fields. The closed-loop microaccelerometer interface circuit with switched capacitor topology has a high signal-to-noise ratio, wide bandwidth, good linearity, and easy implementation i...

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Bibliographic Details
Main Authors: Xiangyu Li, Yangong Zheng, Xiangyan Kong, Yupeng Liu, Danling Tang
Format: Article
Language:English
Published: MDPI AG 2020-12-01
Series:Sensors
Subjects:
MEMS accelerometers
interface circuit
PID feedback
closed-loop
Online Access:https://www.mdpi.com/1424-8220/20/24/7280

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