Dry Film Photoresist-Based Microfabrication: A New Method to Fabricate Millimeter-Wave Waveguide Components

Dry Film Photoresist-Based Microfabrication: A New Method to Fabricate Millimeter-Wave Waveguide Components

This paper presents a novel fabrication method based on dry film photoresists to realize waveguides and waveguide-based passive components operating at the millimeter-wave frequency (30–300 GHz). We demonstrate that the proposed fabrication method has a high potential as an alternative to other micr...

Full description

Bibliographic Details
Main Authors: Sadia Farjana, Mohamadamir Ghaderi, Sofia Rahiminejad, Sjoerd Haasl, Peter Enoksson
Format: Article
Language:English
Published: MDPI AG 2021-03-01
Series:Micromachines
Subjects:
dry film photoresist
gap waveguide
microfabrication
MEMS
THz
Online Access:https://www.mdpi.com/2072-666X/12/3/260

Similar Items

Similar Items