Post Fabrication Processing of Foundry MEMS Structures Exhibiting Large, Out-of-Plane Deflections
This research effort is focused on the development of large angle, out-of-plane bimorph MEMS micromirrors fabricated in the PolyMUMPs foundry process. Based on design constraints of the PolyMUMPs process, current designs fabricated do not meet the requirements to enable large angle optical steering....
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2017-08-01
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| Series: | Proceedings |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2504-3900/1/4/553 |